Ultrasonic probe and method for the fabrication thereof
A technology of ultrasonic probe and piezoelectric element, applied in ultrasonic/sonic/infrasonic diagnosis, sonic diagnosis, infrasonic diagnosis, etc., can solve the complex manufacturing process of epoxy paste layer and flexible printed circuit board, low performance, ultrasonic probe performance deterioration, etc.
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[0055] Manufacture according to the present invention by the method that comprises the step shown in Fig. 2 and 3 figure 1 Ultrasound probe shown.
[0056] Prepare a piezoelectric single crystal substrate 10 having a (001) plane (surface 10a) and a size of 20-25mm×15-20mm×0.4-0.5mm, and at room temperature and 1.2×10 -7 A metal layer (Cr / Cu / Au) 20" ( Figure 2a and 2b ).
[0057] Next, two grooves 30 and 30' are respectively formed on the surfaces 10a and 10b of the metal-deposited piezoelectric single crystal substrate using a dicing machine, thereby separating the metal layer 20" into two electrodes 20 and 20': The groove 30 is formed on the electrode layer 20a' deposited on the surface 10a parallel to the edge formed with the surface 10d and at a distance of 1-1.5 mm from said edge, while the groove 30' is formed on the electrode deposited on the surface 10b. layer 20", distance from the side of the substrate surface 10c 1-1.5mm ( Figure 2c ). The two grooves 30 and ...
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