Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

XYZ-axes table

A technology of pillow blocks and worktables, which is applied in the field of XYZ axis table plates, and can solve problems such as damage

Inactive Publication Date: 2009-04-22
HITACHI LTD
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the XYZ axis table, since the linear motor disclosed in the prior art has a large amount of leakage magnetic flux between the armature and the movable member, and the magnetic attraction force is exerted on the portion between the armature and the movable member in one direction, Therefore a relatively large load is exerted on the supporting mechanism of the movable element, so that there is a problem of producing damage in the structure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • XYZ-axes table
  • XYZ-axes table
  • XYZ-axes table

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0031] Embodiments of the present invention will be described below with reference to the drawings.

[0032] figure 1 is a schematic diagram of the basic structure of the XYZ axis table according to the embodiment of the present invention;

[0033] exist figure 1 Among them, reference numeral 101 denotes a base, reference numeral 102 denotes a guide rail of a linear guide device, reference numeral 103 denotes a table, reference numeral 3X denotes an armature for driving a linear motor for an X-axis, and reference numeral 3Y denotes an electric motor for driving a linear motor for a Y-axis. An armature, reference numeral 3Z designates the armature of the Z-axis driving the linear motor, reference numerals 6X, 6Y and 6Z designate movable elements along the respective axes, and reference numeral 108 designates an arm. Therefore, an XYZ-axis stage with a linear motor is composed of the above-mentioned elements. Armature 3X has parts X1 and X2. Armature 3Y has sections Y1 and Y...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides an XYZ-axes table with a linear motor. The XYZ-axes table has a base, a plurality of linear guiding apparatuses, a stage, an X-axis drive linear motor, a Y-axis drive linear motor, and a Z-axis drive linear motor. The linear motor is constituted by an armature and a movable element being capable of relatively moving with respect to the armature. The linear motor further has one magnetic pole teeth rows which are magnetically connected to one magnetic pole of the armature and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to a moving direction of the movable element, and another magnetic pole teeth rows which are magnetically connected to another magnetic pole of the movable element and are arranged so as to be separated into a first stage and a second stage in a substantially vertical direction to the moving direction of the movable element, the first stage of magnetic pole teeth in the one magnetic pole teeth rows and the first stage of magnetic pole teeth in the another magnetic pole teeth row are alternately arranged with respect to the moving direction of the movable element, the second stage of magnetic pole teeth in the one magnetic pole teeth rows and the second stage of magnetic pole teeth in the another magnetic pole teeth row are alternately arranged with respect to the moving direction of the movable element, and the movable element is arranged between the one and another first stage of magnetic pole teeth rows and the one and another second stage of magnetic pole teeth rows.

Description

technical field [0001] The present invention relates to an XYZ-axis table, and more particularly to an XYZ-axis table for positioning a time scale (mask) in a stepper device, a machine tool, and other exposing devices, the Stepper devices are used in the manufacture of semiconductors. Background technique [0002] In a general XYZ-axis stage, in the case of using a linear motor, in the structure of the linear motor, the rotation mechanism is turned off and on so as to be driven in a linear manner. [0003] In the XYZ axis table, since the linear motor disclosed in the prior art has a large amount of leakage magnetic flux between the armature and the movable member, and the magnetic attraction force is exerted on the portion between the armature and the movable member in one direction, Larger loads are therefore exerted on the support mechanism of the movable element, with the problem of damage in the structure. Contents of the invention [0004] It is an object of the pr...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B23Q5/28H02K41/02B23Q1/62G12B5/00H01L21/68H02K41/03H02P5/00H02P25/06
CPCB23Q5/28H02K2201/18B23Q1/626H02K41/031H01L21/027
Inventor 金弘中长沼良一清野博光
Owner HITACHI LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com