Dual piezoelectric nano positioning and voltage electrical driver, its control method and controller

A piezoelectric driver, nano-positioning technology, applied in piezoelectric devices/electrostrictive devices, generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, etc. Temperature zone, low cost, small volume and other issues, to achieve the effect of simple structure, large thrust and large working temperature zone

Inactive Publication Date: 2009-10-07
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to avoid the shortcomings of the above-mentioned prior art, the present invention provides a dual piezoelectric body linear nano-positioning piezoelectric driver, its control method and controller, by adopting only two piezoelectric actuators and rationally utilizing Friction, to overcome the shortcomings of existing piezoelectric motors that cannot simultaneously have important performances such as large working temperature range, two-way large-range travel, strong thrust, nanometer positioning accuracy, small size, easy integration, and low cost

Method used

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  • Dual piezoelectric nano positioning and voltage electrical driver, its control method and controller
  • Dual piezoelectric nano positioning and voltage electrical driver, its control method and controller
  • Dual piezoelectric nano positioning and voltage electrical driver, its control method and controller

Examples

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Embodiment 1

[0065] Example 1: Basic dual piezoelectric linear nanopositioning piezoelectric actuator

[0066] see Figure 1A , the two piezoelectric actuators on the left and right are fixedly connected to the connector 3 in a mechanically in series manner along the deformation direction 1 to form a two-connected body 4 that is independently controllable; or as Figure 1B : Divide the electrode of a piezoelectric actuator into two parts to form two piezoelectric actuators called the left piezoelectric actuator 2A and the right piezoelectric actuator 2B, which deform along the original deformation direction 1 and are integrated with the connecting body 3 The piezoelectric actuator of the component constitutes a dijoint 4 . The deformation refers to piezoelectric deformation.

[0067] Such as Figure 1A and 1B As shown, the left piezoelectric actuator 2A and the right piezoelectric actuator 2B are respectively bounded by their respective mid-sections along their deformation directions, an...

Embodiment 2

[0087] Embodiment 2: force body type driver

[0088] If the gravity of the dijoint itself is used as its pressure on the base body to generate friction and then generate driving force, this driving force is often relatively small and cannot meet many practical needs, especially when it is required to drive in the vertical direction. In this embodiment, by adding a force applying body, the left area, the middle area and / or the right area of ​​the dijoined body are pressed against the substrate with the force applying body, which makes the dijoined body generate greater pressure on the base body to produce more Greater friction, and thus greater thrust.

[0089] Such as image 3 , the dijoined body 4 is placed on the base body 6 and acts on the left, middle and / or right regions of the dijoined body 4 with a force applying body 7, the force applying body 7 uses elastic force, gravity and / or electromagnetic force The dyad 4 is pressed onto the base body 6 and the dyad 4 is press...

Embodiment 3

[0090] Embodiment 3: Forced Pad Driver

[0091] Such as Figure 4 In this embodiment, on the basis of the above-mentioned embodiment, the force-bearing pad 8 is fixed on the left area 5A, the middle area 5C and / or the right area 5B of the two conjoined body 4, and the force-bearing pad 8 and the base body 6 act under pressure, To protect the dijoint 4 or the base 6, change the pressure between each zone and the base 6, change the area of ​​action of the pressure, change the coefficient of static friction, in a word the maximum static friction between each zone of the dijoint 4 and the base 6 can be adjusted. The pressure between the force pad 8 and the base body 6 comes from the original pressure of the area where it is located and the base body, and also can come from its own force on the base body, including its gravity, electromagnetic force, elastic clamping force, and can also come from external force. The pressure that the force body presses it against the base, or the ...

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Abstract

The dual piezoelectric linear nano-positioning piezoelectric actuator, its control method and controller are characterized in that the left and right piezoelectric actuators are fixedly connected in mechanical series along the deformation direction to form an independently controllable duplex; The conjoined body is divided into a middle area, a left area and a right area along its deformation direction, and a base body which slides and fits with the two conjoined bodies in its deformation direction is set, and the two conjoined bodies are arranged or fixed on the other side perpendicular to the deformation direction of the two conjoined bodies. The positive pressure of the force-bearing pad on the top and the base body forms friction forces in the three areas of the base body and the two conjoined bodies, and the maximum static friction force of any one area is not greater than the sum of the maximum static friction forces of the other two areas. The invention only needs two piezoelectric actuators, integrated structure, easy miniaturization and integration, two-way controllable walking, large thrust, large working temperature range, large stroke, high precision, and is also suitable for ultra-low temperature, ultra-high vacuum , strong magnetic field and other extreme physical environments.

Description

technical field [0001] The invention relates to a piezoelectric motor, more specifically a piezoelectric actuator composed of a piezoelectric body and a control electrode arranged on the piezoelectric body, and a control signal provided by a controller to enable the piezoelectric actuator to realize nano-positioning piezoelectric motor. Background technique [0002] There are many types of existing piezoelectric motors, but none of them can have most of the important advantages provided by piezoelectric materials at the same time, including: low price, firm structure, small size, easy integration, large stroke, Two-way controllable propulsion, nanometer precision, strong thrust, large working temperature range, and can work in extreme physical environments such as ultra-low temperature, ultra-high vacuum and ultra-strong magnetic field. A key reason for the lack of all-round piezoelectric motors is that these requirements conflict with each other in many places. It is easy...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00H02N2/02H02N2/06H01L41/08H01L41/09
Inventor 陆轻铀侯玉斌
Owner UNIV OF SCI & TECH OF CHINA
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