Cutting device

A cutting device and cutting edge technology, applied in maintenance and safety accessories, measuring/indicating equipment, electrical components, etc., can solve the problems of identifying cutting blades, not being able to detect cutting blade defects, wear, and optical fibers hindering movement, etc., to achieve contrast clear effect
CN100566931CActive Publication Date: 2009-12-09DISCO CORP

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
DISCO CORP
Publication Date
2009-12-09

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Abstract

The light emitting unit (109) and the imaging unit (114) constituting the cutting insert detection unit (132) for detecting the state of the cutting edge of the cutting insert face each other and attached to the insert cover (104). Since the light-emitting unit (109) and the imaging unit (114) are opposite to each other, even if there is spray of cutting water, it is possible to clearly recognize the outer peripheral shape of the cutting edge portion (102a) of the cutting insert (102). image. In addition, by attaching the light emitting unit (109) and the imaging unit (114) to the blade cover (104), it is unnecessary to use an optical fiber and no wiring is required. In this way, in the cutting device having the function of taking an image of the cutting edge portion of the cutting insert and detecting its defect and wear, the state of the cutting insert can be reliably grasped without being constrained by the wiring of the optical fiber through which the light for imaging passes. Take a video.
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Description

technical field

[0001] The present invention relates to a cutting device having a cutting blade, and more particularly to a cutting device having a function of detecting the state of chipping and wear of the cutting blade. Background technique

[0002] Wafers formed with multiple devices such as LCs and LSIs are cut vertically and horizontally by cutting blades rotating at high speeds, and are divided into individual chips for use in various electronic devices.

[0003] The above-mentioned cutting insert is mounted on a high-speed rotating spindle and used, and a cutting edge portion is formed on the outer periphery thereof. The cutting edge portion is formed by fixing abrasive grains made of diamond or the like by means of electroforming, metal bonding, or resin bonding. Therefore, cutting causes the cutting edge portion to deteriorate over time, causing chipping and wear, and there are defects caused by cutting. The problem that the quality of each device deteriorates. ...

Claims

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