Microlen array based laser beam divegence angle testing method

A technology of microlens array and testing method, which is applied in the field of optics and can solve the problems of poor real-time testing and large measurement errors
CN101013030AInactive Publication Date: 2007-08-08HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HARBIN INST OF TECH
Publication Date
2007-08-08
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention is a laser beam divergence angle testing method based on the micro-lens array, and the invention belongs to the optical field, specifically relating to the laser beam divergence angle testing method. It overcomes the existing deficiencies of the existing beam scattered angle method with larger measurement error and less measurement real-time feature. It includes the following steps: the measured beam is incidence to the telescope system, matching the output beam diameter and the micro-lens array shape, and the micro-lens array contains mXn matrix sub-lens; using micro-lens array to divide the measured beam into the sub-beams, and through CCD to detect the launch angle of each sub-beam, and through statistical method to calculate the measured beam divergence angle, the measurement accuracy reaching 0.1mu rad. Because this method does not require the measurement light spot diameter, it avoids the problem that the light spot diameter is difficult to be accurately measured. This method in the invention is only measuring in the one position of the optical path; therefore the method can facilitate to realize the real-time measurement of the beam divergence angle.
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Description

technical field

[0001] The invention belongs to the field of optics, in particular to a method for testing the divergence angle of laser beams. Background technique

[0002] Laser beam divergence angle is an important parameter of existing laser emitting devices, and its accurate measurement is an important issue in the development and application of high-precision laser emitting devices. Existing test methods generally measure the spot diameter at different positions, and calculate the beam divergence angle according to its variation with distance. In actual operation, due to the vignetting of the edge of the beam, it is difficult to measure the spot diameter accurately, resulting in a large measurement error. In addition, because this method requires multiple measurements at different locations, the real-time performance is poor. Contents of the invention

[0003] The purpose of the present invention is to provide a method for testing laser beam divergence angle based ...

Claims

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