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Microelectrode biosensing chip of 3D nanogap mesh array

A biosensing and grid array technology, applied in the field of three-dimensional nano-gap grid array micro-electrode bio-sensor chips, can solve problems such as no related reports on micro-nano biosensors

Inactive Publication Date: 2007-10-03
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

However, at present, the micro-nano biosensors that combine the above principles and technologies have not been reported in domestic and foreign research.

Method used

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  • Microelectrode biosensing chip of 3D nanogap mesh array
  • Microelectrode biosensing chip of 3D nanogap mesh array

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specific Embodiment

[0032] in 1×1cm 2 A gold electrode array with a line width of 30 μm, i.e. the lower electrode array 6, is made by using a lift-off process on the glass substrate 1, and then a layer with a thickness of 100 nanometers is thrown on the glass sheet on which the lower electrode array 6 has been made. Thick polyimide film insulation layer 4, and then use the lift-off process to make the upper electrode array 2 with a line width of 10 μm, and then throw a 2 μm thick SU8 glue 31, engrave a wall thickness of 500 μm, and an opening area of ​​0.5 ×0.5cm 2 The sample spotting cell 3 is etched by reactive ion etching at the end with an opening area of ​​50×70 μm 2 The samples were analyzed in microcells 5 .

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Abstract

The present invention relates to micro analysis chip technology, and is especially one kind of 3D micro electrode biosensing chip with nanogap mesh array. The chip has one insulating substrate, one group of gold electrodes on the substrate, one insulating material film in nanometer thickness to cover the gold electrodes and one group of electrodes perpendicular to the gold electrodes to constitute a mesh structure. The insulating layer in and around the crossing sites is eliminated to form micro flow ponds for biological sample analysis, and one large sample analyzing pond is formed with polymer on the chip. The electrode arrays in two planes may be combined in different forms to generate required electric field, and the upper and the lower electrodes constitute measuring sensors with nanometer interval. The present invention may be used in separable and addressable detection of biological sample.

Description

technical field [0001] The invention relates to the technical field of micro-nano biosensors, and relates to the structural design of a micro-analysis chip system, in particular to a three-dimensional nano-gap grid array micro-electrode biosensing chip capable of dielectrophoretic separation and impedance detection of biological samples. Background technique [0002] Reducing cost and reducing time is one of the important issues concerned in the process of clinical medical diagnosis, especially for the diagnosis of molecular and cellular levels. The “point of care testing” (POCT) technology developed on the basis of sensing technology can be said to be one of the fastest-growing technologies in the international medical testing field. Inexpensive, fast, portable, and multi-functional are important development trends of POCT devices, which require the support of sensitive, fast-response, and highly integrated micro-nano sensors. With the development of information technology...

Claims

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Application Information

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IPC IPC(8): G01N27/04G01N33/48C12Q1/02B01D57/02
Inventor 赵湛刘泳宏
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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