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Piezoelectric drive device and liquid discharging device

A technology of piezoelectric drive and drive device, which is applied in the direction of liquid variable capacity machinery, generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, etc., which can solve difficult configuration and difficult to satisfy cam drive, etc. Problems, to achieve the effect of easy miniaturization and thinning, high-speed drive

Inactive Publication Date: 2008-01-30
NOIBERUKU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned cam drive method can drive at a higher speed than the cylinder drive, but it is difficult to make a compact structure, and there is a problem of increasing the size of the pump.
In particular, in the production line of various products such as LEDs, there are also cases where a pump is attached to the front end of the manipulator of a production robot, and liquid is discharged while moving it. Although pumps that are as compact and lightweight as possible are required, there are The problem that the cam drive is difficult to satisfy this desire

Method used

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  • Piezoelectric drive device and liquid discharging device
  • Piezoelectric drive device and liquid discharging device
  • Piezoelectric drive device and liquid discharging device

Examples

Experimental program
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no. 1 Embodiment approach

[0054] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0055] FIG. 1 shows a liquid discharge device 1 of the present embodiment. In addition, in the following description, for convenience, the upper side in FIG. 1 is described as the upper side and the lower side is described as the lower side. However, the orientation of the liquid discharge device 1 when used is not limited to that shown in FIG. Use it facing horizontally or upside down.

[0056] The liquid discharge device 1 is a diaphragm pump and includes a piezoelectric drive device 2 and a pump unit 3 of the liquid discharge device 1 .

[0057] [Structure of piezoelectric actuator]

[0058] The piezoelectric drive device 2 includes a drive unit case 4 , a pump case 5 screwed to the drive unit case 4 , and a drive unit main body 6 .

[0059] The driving device main body 6 includes a displacement amplifying plate 10 built in the housings 4 and 5 , an urging mechani...

no. 2 Embodiment approach

[0182] Hereinafter, a second embodiment of the present invention will be described with reference to FIGS. 17 to 19 . In addition, in each of the following embodiments, the same reference numerals are assigned to the same or similar configurations as those of the above-described embodiments, and descriptions thereof are omitted or simplified.

[0183] The liquid discharge device 1B of the second embodiment is a tube pump in which a tube 710 is used instead of the diaphragm 50 . Furthermore, there are some differences in the structure or shape of the first to third pressing members 31B to 33B, the displacement amplifying plate 10B, and the urging mechanism 15B for pressing the tube 70 from those of the first embodiment, but their operations are similar to those of the first embodiment. 1 The embodiment is the same.

[0184] The displacement amplifying plate 10B has basically the same structure as the displacement amplifying plate 10 described above. However, the first hinge p...

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Abstract

The piezoelectric driving device (2) of the present invention comprises a casing (4, 5) and a driving device main body (6). The driving device main body is provided with a displacement amplifying plate (10), a force applying mechanism (15), and piezoelectric elements (17, 18). The displacement amplifying plate is equipped with a main body (110) that is energized and rotated by the force applying mechanism (15), and amplifies the displacement when the piezoelectric elements (17, 18) are elongated. A displacement amplifying part (120) for displacement in an orthogonal direction. In a state where no voltage is applied to the piezoelectric element, the first driven body (31) is moved by the main body portion biased by the biasing mechanism. When a voltage is applied to the piezoelectric element (17), the second driven body (32) is moved by the displacement amplifier (120). When a voltage is further applied to the piezoelectric element (17) from the state where the driven body (32) is in contact with the object, and the displacement of the displacement amplification part is enlarged, the main body part (110) and the driven body (31) overcome The elastic force described above moves in a direction opposite to the direction in which the force is applied.

Description

technical field [0001] The present invention relates to a piezoelectric driving device using a piezoelectric element as a driving source, and a liquid discharge device using the piezoelectric driving device. Background technique [0002] Diaphragm pumps and tube pumps that use diaphragms or tubes do not damage the liquid to be transported by making the diaphragm or tubes made of synthetic resin, etc., and can discharge liquids filled with various fillers, which eliminates the need for liquid leakage prevention The sealing material can be a structure that the liquid does not touch the metal, etc., and is widely used in the fields of chemicals, pharmaceuticals, semiconductors, and printing. [0003] This kind of pump pushes the diaphragm or tube by driving a plurality of push rods to move back and forth sequentially relative to the diaphragm or tube, or releases the pushing pressure to repeat the suction, metering, and discharge actions of the liquid, thereby discharging the l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B9/00F04B43/04
CPCF04B43/046H02N2/043F04B43/04F04B17/003F04B43/021F04B43/14
Inventor 小川健二
Owner NOIBERUKU
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