Unlock instant, AI-driven research and patent intelligence for your innovation.

Substrate detecting device

A substrate inspection and substrate technology, which is applied in the direction of instruments, electronic circuit testing, optics, etc., can solve the problem of increasing the occupied area of ​​the substrate inspection device, and achieve the effect of preventing the increase of the occupied area and reducing the occupied area

Inactive Publication Date: 2010-09-29
SHIMADZU SEISAKUSHO CO LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The above-mentioned configuration is a configuration in which the detector frame stocker storing the detector frame is arranged side by side on the same plane as the main chamber, so that the occupied area of ​​the substrate inspection device is increased beyond the detector frame stocker. The problem of setting the amount of area

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Substrate detecting device
  • Substrate detecting device
  • Substrate detecting device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0055] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the substrate to be inspected by the substrate inspection device can be applied to various substrates such as organic EL substrates and semiconductor substrates in addition to TFT substrates such as liquid crystal substrates.

[0056] Hereinafter, the first aspect of the substrate inspection of the present invention is used Figure 1(a) , 1(b) ~ Figure 8 To explain, use the second form Figure 9(a) , 9(b) ~ Figure 14 Be explained. Here, the first form is a configuration in which the detector frame stocker is arranged in the upper part of the load fixing chamber, and the second form is a configuration in which the detector frame stocker is arranged in the upper part of the main chamber.

[0057] First, a first embodiment of the substrate inspection apparatus of the present invention will be described. Figure 1(a) , 1(b) , Figure 2(a) , ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides a baseplate testing device which prevents the aggrandizement of the occupied area by setting the detector frame stocker. The baseplate testing device (1) includes: a main chamber (2) for testing the baseplate at vacuum state; a load fixing chamber (3), and the baseplate is moved in or moved out between the load fixing chamber and the atmosphere side or between the load fixing chamber and the main chamber; a detector frame stocker (4) for storing the detector frame(20) which is in electric contact with the baseplate and loads detecting signals onto the baseplate;furthermore, the detector frame stocker (4) is positioned on the top of the load fixing chamber (3) or the main chamber (2). The occupying area of the load fixing chamber (3) or the main chamber (2) can be directly used as the occupying area of the detector frame stocker (4) by adopting the structure that the detector frame stocker (4) is positioned on the load fixing chamber (3) or the main chamber (2), thus, the aggrandizement of the occupied area can be prevented.

Description

technical field [0001] The present invention relates to a substrate inspection device, in particular to replacement of a prober frame of a jig used in substrate inspection, and is suitable for inspection of TFT arrays (arrays) used in the manufacture of LCDs device. Background technique [0002] As a configuration in which TFTs (thin film transistors) are arranged in an array, examples of liquid crystal substrates are mentioned, which are used in flat panel displays (FPDs) such as liquid crystal displays. [0003] The basic configuration of a liquid crystal display using TFTs is a liquid crystal panel in which liquid crystal flows between a glass substrate on which TFTs and transparent pixel electrodes are formed and another glass substrate on which a counter electrode is formed. [0004] In the inspection of glass substrates (hereinafter referred to as [TFT substrates]) on which TFTs and transparent pixel electrodes are formed, it is known that each transparent pixel on th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13
CPCG01R31/302G02F1/1303G02F1/1309G09G3/006G02F1/136254
Inventor 冈本英树棚瀬顺一郎黑田晋一
Owner SHIMADZU SEISAKUSHO CO LTD