Method for improving temperature measurement accuracy of modem probe
A temperature measurement accuracy and probe technology, applied in the field of improving the temperature measurement accuracy of a modulation probe, can solve problems such as undisclosed specific methods, avoid the influence of the temperature measurement error of the modulation plate, avoid the influence of the measurement error, and eliminate the probe response curve. effect of influence
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[0024] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0025] The invention provides a method for improving the temperature measurement accuracy of a modulation probe. When the temperature is detected by the modulation probe, it is not necessary to measure the temperature of the modulation plate, and the temperature of the object to be measured is not measured with the temperature of the modulation plate as the background temperature, but to detect the object under test. After detecting a reference object, the probe response curve is corrected according to the probe output of the probe reference object and the temperature of the reference object, and the temperature of the measured object is calculated according to the corrected probe response curve, which can eliminate the temperature change of the modulation plate. The influence of temperature accuracy improves the temperature measurement accuracy of the modulation...
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