Creeping motion type piezoelectricity straight line driver

Abstract

The invention discloses large-stroke squirmy piezoelectric linear actuator with nano-class precision, and mainly comprises a base, a guide mechanism, an adjustable clamping mechanism, an adjustable intermediate driving mechanism, an output shaft with a flange disc, and a clamping fixed supporting bracket. The base is used for fixing the clamping fixed supporting bracket, the clamping fixed supporting bracket is used for fixing a dual-parallel straight-line guide rod to form a guide plane; the adjustable intermediate driving mechanism is firmly integrated with the output shaft with the flange disc into a whole and can freely move on the guide mechanism, and the output shaft is matched with the clamping fixed supporting bracket in a small gap; the adjustable clamping mechanism adjusts the gap between the clamping mechanism and the output shaft through an adjusting bolt under the base so as to reach the zero gap. The guiding structure of the dual-parallel straight-line guide rod not onlycan guarantee the high linear degree, but also can prevent the decrease of the performance after the actuator is operated for a long period of time. The actuator has simple and compact structure, is easy to be mounted, is adjustable, is convenient to be controlled and is applicable to the precise processing and the application of the precise movement platform.

Description

technical field [0001] The invention relates to a large stroke peristaltic piezoelectric linear driver with nanometer precision. It belongs to the technical field of precision instruments and equipment. Background technique [0002] The linear actuator with nanometer precision is the power part of nanotechnology, and is called the heart of nanotechnology. Many famous research institutions at home and abroad regard this micro-drive system as the main research direction. The traditional electromagnetic rotary motor must be converted into linear motion through a specific mechanism, making it difficult to achieve nanometer-precision linear motion. Therefore, solid-state actuators, especially piezoelectric actuators, show advantages in micro-actuated positioning technology when the motion resolution reaches the submicron or nanometer level. Compared with the electromagnetic linear motor, the piezoelectric ceramic driver has the characteristics of small inertia, fast response, ...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to design a peristaltic piezoelectric linear actuator with a novel structure, which can avoid performance degradation caused by friction and wear after long-term operation, and the system cost is low, easy to install and adjustable High output force and speed

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