Multipath fluid leakage detector
A technology of detector and liquid leakage, which is applied in the direction of detecting the appearance of fluid, instruments, alarms, etc. at the leakage point, which can solve the problem that the correctness and response speed of the liquid leakage sensor have not reached the ideal effect, and increase the detection coverage. , The effect of large liquid impedance range
Active Publication Date: 2008-07-02
SEMICON MFG INT (SHANGHAI) CORP +1
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Problems solved by technology
However, for the liquid leakage problem of ultrapure water with high impedance, the above-mentioned liquid leakage sensor has not yet achieved ideal results in the correctness of detection results and response speed.
Method used
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[0021] The multi-channel liquid leakage detector of the present invention will be further described in detail below.
[0022] see figure 1 , The multi-channel liquid leakage detector of the present invention has a liquid leakage detection unit 10 , which includes a detection circuit 12 and an amplification circuit 13 . The detection circuit 12 has a pair of detection elements 11, and the detection element pair 11 is connected with a liquid leakage sensor 101 arranged near the liquid pipeline. The liquid leakage sensor 101 has two electrode elements, and when the leakage liquid exists between the two electrode elements, it will This causes the electrode elements to be in electrical contact, so that the impedance of the liquid leakage sensor 101 changes from infinity to the impedance of the leaking liquid. In a preferred embodiment of the present invention, the liquid leakage sensor 101 adopts a flat cable with a thickness of 0.1-0.5 mm, which is laid under the raised floor of ...
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Abstract
The invention provides a multi-path leakage detector, which comprises at least one leakage sensor with a pair of electrode elements, a power supply circuit and at least a leakage detection unit. A pair of detection elements are connected with the leakage detector to obtain the input impedance between the electrode elements and generate a detection signal, the detection signal is amplified and inputted into a comparison circuit for comparing with a reference voltage, then a comparison voltage is outputted and transmitted to a warning circuit, and when the comparison voltage is a positive value, the warning circuit drives an alarm apparatus for alarming. The multi-path leakage detector arranged with a plurality of leakage detection units can detect the leakage of various fluids on every path of equipment and give an alarm. The time response is short, and the alarm indicator lamp can distinguish the positions of leakage points, so that an operator or an operator on duty can easily find the leakage points.
Description
technical field [0001] The invention relates to liquid leakage detection of semiconductor equipment, in particular to liquid leakage detection equipment. Background technique [0002] The semiconductor process equipment in the wafer manufacturing plant stores liquids used in different processes, such as ultrapure water and various chemical solutions. The pipelines of these liquids are arranged under the raised floor of the clean room. When one of the liquid pipes When liquid leakage occurs in the pipeline, it may cause failures of other equipment in the clean room, or even cause serious accidents. If toxic chemical solutions are transmitted in the leakage pipeline, it will also cause great harm to the clean room environment and human health. hazards. [0003] Liquid leakage is an unavoidable problem, so an effective liquid leakage detection device is needed to detect the liquid leakage at the first time, so that the staff can take countermeasures in time. An existing liqui...
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Login to View More IPC IPC(8): G01M3/18G01M3/40G08B21/00G08B3/10G08B5/36H01L21/66
Inventor 肖叶斌
Owner SEMICON MFG INT (SHANGHAI) CORP