Method for measuring metallic film fatigue life on a flexible substrate

A metal film and flexible substrate technology, applied to the fatigue life test of metal films on flexible substrates, the evaluation of the fatigue performance of metal film materials, and the field of metal film materials, which can solve the problem that the determination method has never been reported before.

Inactive Publication Date: 2008-07-23
山东云度材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For a long time, great attention has been paid to this problem at home and a

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] The polyimide flexible substrate is processed into a traditional tensile sample shape, the narrow and long area in the middle (20×6mm) is the effective working area of ​​the sample, and the wide areas at both ends are the load clamping area. The metal copper film is deposited on the effective working area by magnetron sputtering technology, the thickness is 50 nm, and the deposition process parameters are: sputtering power 150W; sputtering bias -80V; background pressure 4.5×10 -3 Pa; working pressure (Ar) 0.1Pa. A micro-tensile machine with a measuring range of 250N is used to apply a cyclic load to the metal film / flexible substrate system, with a strain range of 0.05%-1.0%, and the resistance test equipment is used to measure the relative change of the resistance of the metal copper film Δ with the number of cycles N. By scanning Electron microscope was used to observe the microstructure of the metal thin film under different cycle numbers during the fatigue process; t...

Embodiment 2

[0017] The polyimide flexible substrate is processed into a traditional tensile sample shape, the narrow and long area in the middle (20×6mm) is the effective working area of ​​the sample, and the wide areas at both ends are the load clamping area. The metal aluminum film is deposited on the effective working area by magnetron sputtering technology, with a thickness of 700 nm. The deposition process parameters are: sputtering power 180W; sputtering bias -70V; background pressure 3.0×10 -3 Pa; working pressure (Ar) 0.2Pa. A micro-tensile machine with a measuring range of 250N is used to apply a cyclic load to the metal film / flexible substrate system, with a strain range of 0.06%-1.2%. The resistance test equipment is used to measure the relative change of the resistance of the metal aluminum film Δ with the number of cycles N. By scanning Electron microscope was used to observe the microstructure of the metal thin film under different cycle numbers during the fatigue process; t...

Embodiment 3

[0019] The polyimide flexible substrate is processed into a traditional tensile sample shape, the narrow and long area in the middle (20×6mm) is the effective working area of ​​the sample, and the wide areas at both ends are the load clamping area. Using magnetron sputtering technology to deposit metal copper film on the effective working area, the thickness is 2 microns, the deposition process parameters are: sputtering power 120W; sputtering bias -80V; background pressure 4.5×10 -3 Pa; working pressure (Ar) 0.1Pa. A micro-tensile machine with a range of 250N is used to apply a cyclic load to the metal film / flexible substrate system, with a strain range of 0.045%-0.9%, and the resistance test equipment is used to measure the relative change of the resistance of the metal copper film Δ with the number of cycles N. By scanning Electron microscope was used to observe the microstructure of the metal thin film under different cycle numbers during the fatigue process; the resistanc...

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Abstract

The invention discloses a fatigue life test method of metallic film on a flexible substrate, which comprises processing fatigue test under integral circulation stress load on a metallic film/flexible substrate system with better interface combination, recording the stress-strain curvature and resistance change-circulation frequency curvature of the metallic film, detecting the metallic film microcosmic structure under different circulation frequencies in the fatigue process to obtain a metallic film surface damage topography-resistance change-circulation frequency curvature. The invention uses the sharp increase of resistance change on the resistance change-circulation frequency curvature to represent metallic film damage and define a fatigue life Nf. The strain amplitude delta epsilon and relative fatigue life Nf obtained from the stress-strain curvature forms the metallic film fatigue property failure evaluation of the metallic film/flexible substrate system. The inventive method has simple test, accurate measurement and prior property.

Description

technical field [0001] The invention relates to a metal thin film material, which belongs to the field of thin film materials, and relates to the evaluation of the fatigue performance of the metal thin film material, in particular to a method for testing the fatigue life of the metal thin film on a flexible substrate. Background technique [0002] Flexible circuit boards are widely used in VLSI and microelectromechanical systems (MEMS). Usually, metal thin film materials (such as copper and aluminum) used as metallized wiring are deposited on the flexible substrate to form a metal thin film / flexible substrate. system. As a metal structure thin film material for engineering, its fatigue performance is an extremely important indicator, which can be used for material safety design and life prediction. However, because the metal thin film material is in the micron or submicron scale in the one-dimensional direction, the research on the fatigue loading and fatigue performance of...

Claims

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Application Information

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IPC IPC(8): G01N27/20G01N3/32
Inventor 孙军张敬刘刚孙晓娟汪承材丁向东江峰
Owner 山东云度材料科技有限公司
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