Acceleration sensor

An acceleration sensor and angle technology, which is applied in the directions of measuring acceleration, multi-dimensional acceleration measurement, speed/acceleration/impact measurement, etc., can solve the problems of inability to distinguish detection frames and large acceleration detection errors, etc.

Active Publication Date: 2008-07-30
MITSUBISHI ELECTRIC CORP
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Problems solved by technology

[0010] For the above-mentioned acceleration sensor in the prior art, it cannot be distinguished whether the detection frame rotates due to such other axis accelerations, angular accelerations, and angular velocities, or whether the detection frame rotates due to the detection target, that is, the acceleration in the thickness direction of the substrate
Therefore, there is a problem that the detection error of the acceleration becomes large.

Method used

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Experimental program
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Embodiment approach 1

[0046] First, the main configuration of the acceleration sensor of this embodiment will be described.

[0047] Referring to FIG. 1 and FIG. 2 , for the convenience of description, the coordinate axes X-axis, Y-axis and Z-axis are introduced. In Figure 1, the X-axis is the positive axis along the right direction along the horizontal direction, the Y-axis is the positive axis along the vertical upper direction, and the Z-axis is the positive direction perpendicular to the upper side of the paper. axis. In addition, the direction of the Z-axis coincides with the acceleration direction that is the measurement target of the acceleration sensor of this embodiment.

[0048] The acceleration sensor of this embodiment mainly includes a substrate 1, first and second torsion beams 11, 12, first and second detection frames 21, 22, a plurality of detection electrodes 40, first and second connecting beams 31, 32, And the inertial mass body 2.

[0049] As the substrate 1, a silicon substr...

Embodiment approach 2

[0106] Referring to FIGS. 14 and 15 , in the acceleration sensor of the present embodiment, excitation electrodes 5 are formed on substrate 1 so as to face inertial mass 2 .

[0107] Other than that, the configuration of the present embodiment is the same as that of the above-mentioned first embodiment, so the same elements are denoted by the same reference numerals, and description thereof will be omitted.

[0108] According to the present embodiment, by applying a voltage between the excitation electrode 5 and the inertial mass 2 , as shown by the arrow in FIG. 15 , an electrostatic force that attracts the inertial mass 2 toward the substrate 1 can be generated. That is, the inertial mass 2 can be electrostatically driven in the thickness direction of the substrate 1 . This electrostatic drive can generate the same displacement as that of the inertial mass 2 when the acceleration az in the thickness direction of the substrate 1 is applied to the acceleration sensor. Therefo...

Embodiment approach 3

[0110] Referring to FIG. 16 , the acceleration sensor of this embodiment has anchor points 90 and support beams 4 provided on a substrate 1 .

[0111] One end of the support beam 4 is supported on the base plate 1 through the anchor point 90 . The other end of the support beam 4 supports the inertial mass 2 .

[0112] The support beam 4 has a 1st support beam 4X and a 2nd support beam 4Y. The first support beam 4X has a shape that can be easily elastically deformed in the Z-axis direction, and hardly elastically deformed in the X-axis direction. The second support beam 4Y has a shape that can be easily elastically deformed in the Z-axis direction, and hardly elastically deformed in the Y-axis direction. Therefore, as a whole, the support beam 4 is configured to be easily elastically deformed in the Z-axis direction and difficult to be elastically deformed in the XY in-plane direction.

[0113] Other than that, the configuration of this embodiment is the same as that of Embo...

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Abstract

First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

Description

technical field [0001] The present invention relates to an acceleration sensor, in particular to an electrostatic capacitance type acceleration sensor. Background technique [0002] As one of the principles of an acceleration sensor for detecting acceleration in the thickness direction of a substrate, there is a method of detecting a change in electrostatic capacitance with acceleration in the prior art. As an acceleration sensor utilizing this method, for example, in Japanese Patent Laid-Open No. Hei JP5-133976 (page 16, Fig. 23 and Fig. 24 ), it is proposed to have a torsion beam, an inertial mass, a detection frame, and a detection electrode as main components. Part of the acceleration sensor. [0003] The acceleration sensor has one detection frame, and the detection frame has a surface facing the substrate. On one end of the detection frame, an inertial mass block is arranged. In addition, the detection frame is supported on the substrate so as to be rotatable around...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G01P15/18
Inventor 绀野伸显平田善明
Owner MITSUBISHI ELECTRIC CORP
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