Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same
A technology of cerium carbonate and cerium oxide, applied in the directions of cerium oxide/cerium hydroxide, rare earth metal oxide/hydroxide, lanthanide oxide/hydroxide, etc. production and other issues
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Embodiment 1
[0060] First, 0.1 mol of anhydrous cerium nitrate was dissolved in 100 ml of distilled water, and the solution was stirred at room temperature for 30 minutes. In a separate vessel, dissolve 0.2 molar ammonium carbonate in 100 ml ethanol at 50 °C. Then, the above two solutions were mixed with each other to precipitate at 75° C. for 6 hours. Through the above method, cerium carbonate powder is obtained.
[0061] The resulting cerium carbonate powder had a cubic structure and a uniform size of 100 nm. By using SEM at a magnification of ×20,000 in figure 1 The particle shape is shown in (here, the length of each scale bar is 2 μm). Furthermore, the crystallinity of the resulting powder was shown by using XRD in Figure 8 middle.
Embodiment 2
[0063] Cerium carbonate powder was prepared in the same manner as described in Example 1, except that 1,4-butanediol was used instead of ethanol and the reaction was performed at a temperature of 85°C instead of 75°C.
[0064] The generated cerium carbonate powder (cerium oxide carbonatehydrate)-Ce(CO 3 ) 2 O·H 2 O) has an orthorhombic structure and a size of about 2-3 μm. By using SEM at a magnification of ×10,000 in figure 2 Particle shapes are shown in (here, the length of each scale is 5 μm). Furthermore, the crystallinity of the resulting powder was shown by using XRD in Figure 8 middle.
Embodiment 3
[0066] Cerium carbonate powder was prepared in the same manner as described in Example 1 except that ethylene glycol was used instead of ethanol and the reaction was performed at a temperature of 85°C instead of 75°C.
[0067] The generated cerium carbonate powder (cerium oxide carbonate hydrate-Ce(CO 3 ) 2 O·H 2 O) has an orthorhombic structure and a size of about 500-600 nm. By using SEM at a magnification of ×20,000 in image 3 The particle shape is shown in (here, the length of each scale bar is 2 μm). Furthermore, the crystallinity of the resulting powder was shown by using XRD in Figure 8 middle.
[0068] In Example 1 above, the reaction was carried out at 75°C, which is lower than the boiling point of ethanol. As can be seen from Examples 1-3, the size and shape of the cerium carbonate particles can be changed by changing the organic solvent used for the cerium precursor and the carbonate precursor.
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