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Vibrating isolation foundation precise leveling system

A vibration isolation platform and foundation technology, applied in infrastructure engineering, protection devices, buildings, etc., can solve the problems of inability to achieve high-precision flatness, unreachable, large area, etc., to protect normal operation and solve the problem of virtual legs , the effect of maintaining system stability

Inactive Publication Date: 2009-01-28
CHINA JILIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The vibration isolation foundation is generally made of reinforced concrete and has a large area, which cannot achieve high-precision flatness and cannot meet the requirements of ultra-precision instruments and equipment

Method used

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  • Vibrating isolation foundation precise leveling system
  • Vibrating isolation foundation precise leveling system
  • Vibrating isolation foundation precise leveling system

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Such as figure 1 As shown, the present invention includes a vibration isolation foundation 1, a damping precision optical vibration isolation platform 2, four air springs 3, an air supply device 6, a level monitor, a virtual leg monitoring device, a controller 5 and a control valve; the vibration isolation foundation 1 The four corners of the bottom surface are respectively supported by four air springs 3. The damped precision optical vibration isolation platform 2 is placed on the vibration isolation foundation 1, and two damped precision optical vibration isolation platforms 2 are placed on it to measure two mutually perpendicular The level monitor of the angle between the precise optical vibration isolation platform and the absolute horizontal plane in the direction, the "virtual leg" monitoring device is connected to the respective air spring 3, and the output terminals of the level monitor and the virtual leg monitoring device are respectively connected to the contr...

Embodiment 2

[0032] Such as figure 2 As shown, the present invention includes a vibration isolation foundation 1, an air cushion type precision optical vibration isolation platform 9, four air springs 3, an air supply device 6, a level monitor, a virtual leg monitoring device, a controller 5 and a control valve; the vibration isolation foundation 1. The four corners of the bottom surface are respectively supported by air springs 3. The air-cushion type precision optical vibration isolation platform 9 is placed on the vibration isolation foundation 1, and two air-cushion type precision optical vibration isolation platforms 9 are placed on it to measure two vertical directions. The level monitor of the angle between the vibration isolation platform and the absolute horizontal plane, and the virtual leg monitoring device are respectively connected to the respective air springs 3, and the output ends of the level monitor and the virtual leg monitoring device are respectively connected to the i...

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Abstract

The invention discloses a precise leveling system of a vibration isolation foundation bed. The lower bottom surface of the vibration isolation foundation bed is supported by air springs; a precise optical vibration isolation platform is arranged on the vibration isolation foundation bed; one or two level monitors are arranged on the precise optical vibration isolation platform for measuring an included angle between the vibration isolation platform and the absolute level in two mutually vertical directions; flexible leg monitoring devices are respectively connected with the own air springs; the output ends of the level monitors and the flexible leg monitoring devices are respectively connected with the input ends of controllers; the output ends of the controllers are connected with all control valves; an air channel port of each control valve is respectively connected with the own air spring; air supplying devices respectively supply air for each control valve. The precise leveling system realizes vibration isolation of Grade II; the vibration isolation platform has highly precise planarity and meets requirements of various precision instruments for the environment; the control valves realize the air inflow of a small amount during the charging process of the air springs, improve leveling precision and can keep the system stable. The precise leveling system is applicable to ultra precise measurement and processing.

Description

technical field [0001] The invention relates to a vibration-isolation foundation precision leveling system, in particular to a vibration-isolation foundation precision leveling system supported by an air spring. Background technique [0002] The foundation vibration isolation system supported by air springs has been applied in the fields of ultra-precision measurement and ultra-precision machining. At present, the main parts of the actual air spring vibration isolation system include foundation, air spring, air supply device, and height control unit. Its height control link is based on the ground, and the displacement sensor is used to measure the relative displacement between the foundation and the ground to control the switch of the inflation valve to change the height of the foundation. The ground is not absolutely level, so the base points measured by each displacement sensor are different. It is difficult for multiple air springs supporting the foundation to rise to th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): E02D31/08
Inventor 李东升叶树亮满楠
Owner CHINA JILIANG UNIV
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