Split pattern displacement deviation monitoring system

Abstract

The invention relates to a tiled grating displacement error monitoring system, which comprises a grating tiling device for mounting a tiled grating, wherein a fine adjuster platform of the grating tiling device is provided with a piezoceramics driver; two polar plates of a first digital capacitance micro-displacement sensor are oppositely arranged on positions in the horizontal direction of a coarse adjuster platform and a lower platform of the fine adjuster respectively; two polar plates of a second digital capacitance micro-displacement sensor are oppositely arranged on positions perpendicular to the lower platform and an upper platform of the fine adjuster respectively; output ends of the first and second digital capacitance micro-displacement sensors are connected with the input end of a signal sample circuit; the output end of the signal sample circuit is connected with the input end of a controller of a singlechip; the output end of the singlechip is connected with a PC through a serial port communication circuit; and the output end of the PC is connected with the control end of the piezoceramics driver through a D/A converter.

Description

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AI Technical Summary

Benefits of technology

This technology improves upon existing methods for aligning optical fibers with other components such as connectors or filters used during manufacturing processes by reducing variations caused by factors like temperature changes that can affect alignment quality. It also allows for precise placement within specific areas without adding extra equipment at an increased risk compared to traditional techniques. Overall, this new method provides improved performance over previous methods while being more efficient, accurate, reliable, easy to use, compact, etc., which are important technical benefits.

Problems solved by technology

This patented technology describes how to create very long narrow grille patterns by combining multiple smaller submillers together into larger ones called Ground Spacell Grids. These techniques involve aligning different layers of material at specific locations before adding another layer can improve their alignment precision. Additionally, these methods aim to maintain stable performance over longer periods without causing any instability issues such as thermal expansion caused by temperature changes.

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