Heat-variable surface shearing stress sensor

A shear stress and sensor technology, applied in the field of micro-electromechanical systems, can solve the problem of not being able to obtain surface shear stress at the same time, and achieve the effect of improving time and space resolution and realizing miniaturization.

Inactive Publication Date: 2009-09-02
NANJING UNIV OF SCI & TECH
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Problems solved by technology

Therefore, this structure can only measure the magnitude of the surface shear attraction, and cannot obtain the information of the direction of the surface she

Method used

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  • Heat-variable surface shearing stress sensor
  • Heat-variable surface shearing stress sensor
  • Heat-variable surface shearing stress sensor

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Embodiment Construction

[0015] combine image 3 and Figure 4 , the thermosensitive surface shear stress sensor of the present invention includes a heating / thermosensitive coil 1, a support film 2, heat insulation grooves 3a, 3b, 3c, 3d, support beams 4a, 4b, 4c, 4d, and thermosensitive electrodes 5a, 5b , 5c, 5d, 5e, 5f, 5g, 5h, an electrical insulating film 6, a silicon substrate 7 and a lead electrode 8, forming a support film 2 and an electrical insulating film 6 by depositing on the surface of the silicon substrate 7, the The substrate under the support film 2 is etched away, and supports the heating / thermosensitive coil 1; the support film 2 and the electrical insulation film 6 are connected by support beams 4a, 4b, 4c, 4d, and the electrical insulation film Prepare thermosensitive electrodes 5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h on 6, and the thermosensitive electrodes 5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h are evenly distributed in the heating / thermal The outer edge of the sensitive coil 1 is a thermal in...

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Abstract

The invention discloses a heat-variable surface shearing stress sensor, which comprises a heating/heat-variable coil, a support film, a heat insulating groove, a support beam, a heat-variable electrode, an electric insulation film, a silicon bulk and a lead electrode. The sensor forms the support film and the electric insulation film by depositing on the surface of the silicon bulk, an substrate under the support film is etched which plays a role in supporting the heating/heat-variable coil; the support film is connected with the electric insulation film through the support beam; mutually independent heat-variable electrodes on the electric insulation film are prepared; and the heat-variable electrodes are evenly distributed on the outer edge of the heating/heat-variable coil; the heat insulating groove is arranged between the heating/heat-variable coil and the heat-variable electrodes; and the heating/heat-variable coil and the heat-variable electrodes are connected with an outside circuit through the lead electrode respectively. The sensor can determine the direction of liquid in a plane, and simultaneously measure the surface shearing stress on the solid surface generated by the liquid.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), in particular to a heat-sensitive surface shear stress sensor. Background technique [0002] The measurement of surface shear stress is of great significance in basic scientific research, industrial control and biomedical applications. For example, under hypersonic conditions, accurately obtaining information on the magnitude of the frictional stress on the surface of the aircraft and the transition of the boundary layer will provide a reliable basis for the correct thermal protection design. [0003] Traditional macro-scale measurement techniques cannot meet the requirements of obtaining accurate surface shear stress data. The advantages of miniaturization of MEMS technology make the shear stress sensor based on MEMS technology have significant advantages. Surface shear stress sensors based on MEMS technology can be mainly divided into two categories, one is dire...

Claims

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Application Information

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IPC IPC(8): G01L1/20G01N13/00B81B7/02B81C5/00
Inventor 黄钦文苏岩裘安萍明晓
Owner NANJING UNIV OF SCI & TECH
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