Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Heat-variable surface shearing stress sensor

A shear stress and sensor technology, applied in the field of micro-electromechanical systems, can solve the problem of not being able to obtain surface shear stress at the same time, and achieve the effect of improving time and space resolution and realizing miniaturization.

Inactive Publication Date: 2009-09-02
NANJING UNIV OF SCI & TECH
View PDF0 Cites 10 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, this structure can only measure the magnitude of the surface shear attraction, and cannot obtain the information of the direction of the surface shear stress at the same time.
The sensor structure has significant limitations when applied to fluids whose direction is unknown, or where the direction may change

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Heat-variable surface shearing stress sensor
  • Heat-variable surface shearing stress sensor
  • Heat-variable surface shearing stress sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0015] combine image 3 and Figure 4 , the thermosensitive surface shear stress sensor of the present invention includes a heating / thermosensitive coil 1, a support film 2, heat insulation grooves 3a, 3b, 3c, 3d, support beams 4a, 4b, 4c, 4d, and thermosensitive electrodes 5a, 5b , 5c, 5d, 5e, 5f, 5g, 5h, an electrical insulating film 6, a silicon substrate 7 and a lead electrode 8, forming a support film 2 and an electrical insulating film 6 by depositing on the surface of the silicon substrate 7, the The substrate under the support film 2 is etched away, and supports the heating / thermosensitive coil 1; the support film 2 and the electrical insulation film 6 are connected by support beams 4a, 4b, 4c, 4d, and the electrical insulation film Prepare thermosensitive electrodes 5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h on 6, and the thermosensitive electrodes 5a, 5b, 5c, 5d, 5e, 5f, 5g, 5h are evenly distributed in the heating / thermal The outer edge of the sensitive coil 1 is a thermal in...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a heat-variable surface shearing stress sensor, which comprises a heating / heat-variable coil, a support film, a heat insulating groove, a support beam, a heat-variable electrode, an electric insulation film, a silicon bulk and a lead electrode. The sensor forms the support film and the electric insulation film by depositing on the surface of the silicon bulk, an substrate under the support film is etched which plays a role in supporting the heating / heat-variable coil; the support film is connected with the electric insulation film through the support beam; mutually independent heat-variable electrodes on the electric insulation film are prepared; and the heat-variable electrodes are evenly distributed on the outer edge of the heating / heat-variable coil; the heat insulating groove is arranged between the heating / heat-variable coil and the heat-variable electrodes; and the heating / heat-variable coil and the heat-variable electrodes are connected with an outside circuit through the lead electrode respectively. The sensor can determine the direction of liquid in a plane, and simultaneously measure the surface shearing stress on the solid surface generated by the liquid.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS), in particular to a heat-sensitive surface shear stress sensor. Background technique [0002] The measurement of surface shear stress is of great significance in basic scientific research, industrial control and biomedical applications. For example, under hypersonic conditions, accurately obtaining information on the magnitude of the frictional stress on the surface of the aircraft and the transition of the boundary layer will provide a reliable basis for the correct thermal protection design. [0003] Traditional macro-scale measurement techniques cannot meet the requirements of obtaining accurate surface shear stress data. The advantages of miniaturization of MEMS technology make the shear stress sensor based on MEMS technology have significant advantages. Surface shear stress sensors based on MEMS technology can be mainly divided into two categories, one is dire...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01L1/20G01N13/00B81B7/02B81C5/00
Inventor 黄钦文苏岩裘安萍明晓
Owner NANJING UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com