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Sensor

A technology of sensors and hammers, which is applied in the field of sensors, can solve problems such as miniaturization, and achieve the effect of suppressing the deterioration of detection accuracy

Inactive Publication Date: 2011-06-15
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, the above-mentioned existing structure has the following problem. Since the sensor is made to correspond to the detection axis of the angular velocity or acceleration to be detected, and the angular velocity sensor and the acceleration sensor are respectively mounted on the mounting substrate, the mounting area must be ensured, and there is a problem that the compact size cannot be achieved. the problem of

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0078] figure 1 It is an exploded perspective view of the acceleration sensor according to Embodiment 1 of the present invention; figure 2 It is a perspective view of a part of the same acceleration sensor; image 3 yes figure 2 Sectional view of A-A; Figure 4 yes figure 2 Sectional view of B-B.

[0079] exist Figure 1 to Figure 4 Among them, the acceleration sensor according to Embodiment 1 of the present invention has the detection element 28 having the following structure. The detection element 28 includes: a first substrate 10 and a second substrate 12 arranged opposite to each other; arranged between the first and second substrates 10 and 12, and fixed to the first and second substrates 10 and 12 via the flexible portion 16 The hammer part 18 to which the fixing part 14 is connected; the first to fourth opposing electrodes 20 , 22 , 24 , and 26 arranged on the respective opposing surfaces of the hammer part 18 and the first substrate 10 . That is, in the prese...

Embodiment approach 2

[0098] In Embodiment 1, the structure in which the pressing part 36 presses the flexible part 16 has been described, for example Figure 8 As shown, the detection element 28 having the hammer portion 18 at the center can obtain the same effect as that of the first embodiment even when the pressing portion 36 presses the hammer portion 18 .

[0099] In addition, in Embodiments 1 and 2, the pressing portion 36 is fixed or formed on the second substrate 12, but the pressing portion 36 may also be fixed or formed on the flexible portion 16 (the first arm 30, the second arm 32, the support part 34 ), the pressing part 36 is pressed by the second substrate 12 .

Embodiment approach 3

[0101] In Embodiments 1 and 2, the detecting element 28 includes the pressing portion 36 that presses the weight portion 18 or the flexible portion 16 . In Embodiment 3, instead of the pressing portion 36 , the second substrate 12 arranged to face the first substrate 10 so as to sandwich the weight portion 18 in the direction of gravity, and the counter electrode arranged on the second substrate 12 are provided.

[0102] Figure 9 It is an exploded perspective view of the acceleration sensor according to Embodiment 3 of the present invention; Figure 10It is a perspective view of a part of the same acceleration sensor; Figure 11 yes Figure 10 Sectional view of A-A.

[0103] exist Figure 9 ~ Figure 11 Among them, the acceleration sensor according to Embodiment 3 of the present invention includes a detection element 28 having an acceleration detection unit and having the following configuration. The detection element 28 has: a first substrate 10 and a second substrate 12...

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Abstract

A sensor is provided with a detecting element (28) having an acceleration detecting section. The acceleration detecting section is provided with a spindle section (18) connected to a fixed section (14) through a flexible section (16), a substrate section (10) facing the spindle section (18), and an electrode section composed of opposite electrodes (20, 22, 24, 26) arranged on the facing surfaces of the spindle section (18) and the substrate section (10). Thus, displacement of the spindle section (18) in a Z axis direction is suppressed, and detection accuracy of acceleration in an X axis or Yaxis is improved.

Description

technical field [0001] The present invention relates to a sensor that detects the acceleration or angular velocity of various electronic devices used for posture control or navigation of mobile bodies such as airplanes, automobiles, robots, ships, and vehicles. Background technique [0002] First, a conventional acceleration sensor will be described with reference to FIG. 20 . [0003] A conventional acceleration sensor includes a fixed substrate 101 , a base glass 102 disposed on the fixed substrate 101 , a flexible substrate 103 disposed on the base glass 102 , and a hammer 104 disposed under the flexible substrate 103 . [0004] Also, above flexible substrate 103, glass substrate 105 is arranged to face flexible substrate 103, and opposing electrodes 106 are provided on opposing surfaces of flexible substrate 103 and glass substrate 105 (Patent Document 1). [0005] Next, acceleration detection using such an acceleration sensor will be described. [0006] When accelerat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125G01P9/04G01C19/56G01C19/5607G01C19/5719G01P15/18
CPCG01P5/14G01P15/125G01C19/5719G01P15/18G01P1/023
Inventor 大内智野添利幸相泽宏幸
Owner PANASONIC CORP