Wire grid polarizer and method for manufacturing the wire grid polarizer, and phase difference film and liquid crystal display element using the wire grid polarizer
A manufacturing method and a technology for polarizers, which are applied in polarizing elements, optical elements, nonlinear optics, etc., can solve problems such as complex processes and achieve the effect of short grating period
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Embodiment 1
[0051] First, prepare a quartz mold (manufactured by NTT-AT Nanofabrication, product name "NIM-80L RESO"), ultraviolet curable resin (manufactured by Toagosei Co., product name "UV-3400"), and a support film (manufactured by Fujifilm, product name "Cellulose triacetate (TAC) film", film thickness: 80 μm).
[0052] Then, a few drops of ultraviolet curable resin were dropped on a quartz mold formed with grating-shaped recesses having a grating period of 200 nm and a line width of 100 nm, covered with a support film, and then ultraviolet cured by rubbing on the support film with a hand roller. The resin spreads evenly on the quartz mold. Then, by irradiating 600mJ / cm on the side of the UV curable resin close to the support film 2 The ultraviolet rays are used to cure the ultraviolet curable resin, so that the coating film of the ultraviolet curable resin formed with the concave portion having a grating shape is bonded to the support film, thereby forming a resin film having a co...
Embodiment 2
[0056] A resin film and a wire grid polarizer were obtained in the same manner as in Example 1, except that an ultraviolet curable resin was dropped on a quartz mold formed with grating-shaped recesses having a grating period of 400 nm and a line width of 200 nm. In addition, the obtained resin film was formed with grating-shaped recesses having a grating period of 400 nm and a line width of 200 nm.
[0057] Scanning electron micrographs of the obtained wire grid polarizers are in figure 2 displayed in . Such as figure 2 As shown, it was proved that a wire grid polarizer having a metal grating with a grating period of 400 nm and a line width of 200 nm was obtained.
Embodiment 3
[0059] A resin film and a wire grid polarizer were obtained in the same manner as in Example 1, except that an ultraviolet curable resin was dropped on a quartz mold formed with grating-shaped recesses having a grating period of 600 nm and a line width of 300 nm. In addition, the obtained resin film was formed with grating-shaped recesses having a grating period of 600 nm and a line width of 300 nm.
[0060] Scanning electron micrographs of the obtained wire grid polarizers are in image 3 displayed in . Such as image 3 As shown, it was proved that a wire grid polarizer having a metal grating with a grating period of 600 nm and a line width of 300 nm was obtained.
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Abstract
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