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Box and robot for conveying the glass substrate and a box system having the box and robot

A technology of manipulator and transfer box, applied in the direction of manipulator, program-controlled manipulator, conveyor objects, etc., can solve problems such as scratching the substrate

Inactive Publication Date: 2012-07-18
SFA ENG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0014] Also, conventional cassettes with pins have the problem that the pins may scratch the substrate when loading or withdrawing substrates into or from the cassette

Method used

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  • Box and robot for conveying the glass substrate and a box system having the box and robot
  • Box and robot for conveying the glass substrate and a box system having the box and robot
  • Box and robot for conveying the glass substrate and a box system having the box and robot

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Embodiment Construction

[0065] Pursuant to 35 U.S.C. §119, this application claims priority based on Korean Patent Application No. 10-2008-0082303 filed with the Korean Intellectual Property Office on August 22, 2008, the disclosure of which is incorporated by reference way incorporated into this article.

[0066] In order to gain a sufficient understanding of the invention, its advantages, and objects to be achieved by practicing the invention, refer to the accompanying drawings for illustrating preferred embodiments of the invention.

[0067] Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the invention with reference to the accompanying drawings. Like reference numerals refer to like elements throughout the figures.

[0068] figure 1 is an exploded perspective view of the cassette system for transferring substrates according to the first embodiment of the present invention; figure 2 and 3 is showing figure 1 A perspective view of the work...

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Abstract

The present invention discloses a box and robot for conveying the glass substrate and a box system having the box and robot. The box system for conveying the substrate includes: a substrate conveying box, which includes a box shell and a plurality of substrate suspending loading plates; and a substrate transfer robot. The substrate transfer robot includes: a robot body; a plurality of fingers, wherein the fingers have ends, the ends are selectively anchored to one lateral wall of the substrate suspending loading plate and are released from one lateral wall of the substrate suspending loading plate; at least one carrier, capable of grasping the substrate in a relative movement mode to load the substrate to the substrate conveying box, or extract the substrate from the substrate conveying box. As a result, a non-contact modus based on air suspension can be adopted when the substrate is loaded to the box or the substrate is extracted from the box, thereby effectively reducing the scratching defects in the substrate compared with the traditional box.

Description

technical field [0001] The present invention relates to a kind of box and manipulator for conveying glass substrate and box system with same, more particularly, to a kind of box and manipulator for conveying glass substrate and have this A cassette system that not only can easily load more substrates into a cassette of a standard cell size than that of a conventional cassette system thereby increasing the efficiency of transferring substrates, but also has A non-contact method based on air suspension is used when withdrawing the substrate, thereby reducing scratch defects on the substrate more effectively than traditional cassette systems. Background technique [0002] With the rapid development of the electronic display industry in the semiconductor industry, a flat panel display (FPD) has recently appeared. [0003] A flat panel display is an image display device that is thinner and lighter than a cathode ray tube (CRT) that has been used as a television (TV) monitor, a c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673H01L21/677H01L21/687B65G49/06B65D85/48B65D6/08B65D25/04B65D25/10B25J9/08B25J15/08
CPCB65G47/901G02F1/1303H01L21/67259
Inventor 张宰植李京南李春植
Owner SFA ENG CORP
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