Unlock instant, AI-driven research and patent intelligence for your innovation.

Perfluoroelastomer composition and sealing material

A technology of perfluoroelastomers and compositions, applied in chemical instruments and methods, other chemical processes, etc.

Active Publication Date: 2010-02-24
3M INNOVATIVE PROPERTIES CO
View PDF3 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, both of the examples above require an additional processing step

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Perfluoroelastomer composition and sealing material

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0064] With 100 mass parts of perfluoroelastomer (trade name "PFE131T", manufactured by Dyneon LLC. (Oakdale, MN)), 7.5 mass parts of additives (trade name "PFE01C", manufactured by Dyneon LLC.), 15 Parts by mass of MT carbon (trade name "N990", manufactured by Cancarb, Ltd. (Alberta, Canada)), 1 part by mass of silicon dioxide (trade name "AEROSIL R-972", manufactured by Japan Aerosil Co., Ltd.) and 0.25 parts by mass of silane-terminated perfluoropolyether (trade name "ECC-1000", manufactured by 3M Company (St. Paul, MN)) were compounded to obtain a sample. The obtained compound was first vulcanized at 188° C. for 15 minutes. The compounds were then vulcanized and molded under post-cure conditions of 200°C and 250°C for 16 hours and 8 hours, respectively, to produce sheets with a thickness of 2 mm.

example 2

[0066] The same operation as in Example 1 was performed except that the amount of ECC-1000 was set to 0.5 parts by mass.

example 3

[0068] The same operation as in Example 1 was performed except that the amount of ECC-1000 was set to 0.75 parts by mass.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Th invention provides an elastomer composition that can be easily prevented from being blocking to a substrate. A perfluoroelastomer composition comprises (A) a perfluoroelastomer and (B) a fluorosilane compound.

Description

[0001] This patent application claims priority from Japanese Patent Application No. 2007-107167 filed on April 16, 2007. technical field [0002] The present invention relates to a perfluoroelastomer composition and a sealing material using the perfluoroelastomer composition. Background technique [0003] Perfluoroelastomers can be used as sealing materials for semiconductor devices such as dry etching devices or chemical vapor deposition (CVD) devices because of their excellent plasma resistance, chemical resistance, and heat resistance. In recent years, extreme production conditions such as heating semiconductor devices to 200° C. or higher have been used. Thus, perfluoroelastomer seals can adhere to device substrates (eg, metal). [0004] Conventional methods, including modification of the perfluoroelastomer surface, are often employed to create a tack-free surface and prevent secure fixation. For example, the surface treatment agent can be dissolved in a solvent capabl...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C08J7/02C08K5/20C08L21/00C09K3/10
CPCC08L71/00C08K5/5406C09K3/1009C08L27/18C08L27/12C08K5/54
Inventor 中里克彦福士达夫
Owner 3M INNOVATIVE PROPERTIES CO