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A method for slotting the guide wheel of a multi-wire cutting machine

A technology of multi-wire cutting machine and slotting method, which is applied in the direction of fine working devices, stone processing equipment, manufacturing tools, etc., can solve the problem of large difference in the thickness of silicon wafers, etc., and achieve the effect of small error and increased production

Inactive Publication Date: 2012-02-15
上海九晶电子材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to provide a method for grooving the guide wheel of a multi-wire cutting machine, so as to make up for the problem that the thickness of the silicon wafer cut out has a large difference between the front and rear of the existing method for grooving the guide wheel of a multi-wire cutting machine

Method used

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  • A method for slotting the guide wheel of a multi-wire cutting machine
  • A method for slotting the guide wheel of a multi-wire cutting machine
  • A method for slotting the guide wheel of a multi-wire cutting machine

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Experimental program
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Effect test

Embodiment 1

[0026] The first groove distance a is determined according to the thickness of the product silicon wafer, the wire diameter of the cutting gold steel wire and the particle size of silicon carbide. The particle size of silicon is 1500 mesh, and the first groove distance a of the solar silicon wafer guide wheel for cutting 6 o’clock is 340 μm; the reduction factor b is determined according to the length of the guide wheel. Generally, the length of the guide wheel is L≤300mm, and the reduction factor b is 10 μm, the groove number n is the nth groove, and the total number of grooves N is 880.

[0027] The first groove pitch is a=340μm; the second groove pitch is a-b*[1 / (N-1)]=340-10*(1 / 879)=339.99; the length of the guide wheel is 300mm, and the reduction factor b is 10μm , the 440th groove pitch is a-b*[(n-1) / (N-1)]=340-10*(439 / 879)=335 μm; the final groove pitch is 330 μm.

[0028] When slotting the guide wheel, make appropriate modifications and adjustments on the computer set...

Embodiment 2

[0030] According to the thickness of the product silicon wafer, the diameter of the cutting gold steel wire and the particle size of silicon carbide, etc., the first groove distance a of the guide wheel for cutting solar silicon wafers is currently 340 μm; the length of the guide wheel is L>300mm, L≤500mm The reduction factor b is 15 μm; the slot number n is the nth slot, and the total number of slots N is 1500 slots.

[0031] The first slot pitch is a=340 μm; the second slot pitch is a-b*[1 / (N-1)]=340-15*(1 / 1499)=339.99; the 751st slot pitch is a-b*[(n-1 ) / (N-1)]=340-15*(750 / 1499)=332.49; the final groove pitch is 325 μm.

[0032] The setting procedure of the computer of the machine tool is the same as that of Embodiment 1, and the effect of increasing production and reducing cost is achieved by adopting this embodiment, and the thickness of the cut product is more consistent and stable.

Embodiment 3

[0034] According to the thickness of the product silicon wafer, the diameter of the cutting gold steel wire and the particle size of silicon carbide, etc., the first groove distance a of the guide wheel for cutting solar silicon wafers is currently 340 μm; the length of the guide wheel is L>500mm, L≤800mm , the reduction factor is 20μm; the slot number n is the nth slot, and the total number of slots N is 2400 slots.

[0035] The first slot pitch a=340; the second slot pitch is a-b*[1 / (N-1)]=340-20*(1 / 2399)=339.99; the 1201st slot pitch is a-b*[(n-1) / (N-1)]=340-20*(1200 / 2399)=330 μm; the final groove pitch is 320 μm.

[0036] The setting procedure of the computer of the machine tool is the same as that of Embodiment 1, and the effect of increasing production and reducing cost is achieved by adopting this embodiment, and the product thickness is more consistent and the technical index is stable.

[0037] The invention is suitable for cutting silicon crystal rods, mainly for c...

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Abstract

A method for slotting the guide wheels of a multi-wire cutting machine. When the guide wheels are slotted to cut silicon wafers, the slotting distance is gradually decreased from the line-in position to the line-out position of the same secondary guide wheel. The slot pitch is equal to a-b*[(n-1) / (N-1)], where a is the first slot pitch, b is the reduction factor, n is the serial number of the slot, N is the total number of slots, N (the total number of slots )=L (length of the guide wheel) / a (the first groove distance); the first groove distance a is determined by the thickness of the product, the wire diameter of the cutting gold wire and the particle size of silicon carbide. The reduction factor b is determined by the length of the guide wheel. The invention has the advantages of small thickness value error of the cut silicon wafer and increased output.

Description

technical field [0001] The invention relates to a method for slotting a guide wheel, in particular to a method for slotting a guide wheel of a multi-wire cutting machine suitable for cutting large-diameter silicon crystal rods and crystal rods of other semiconductor materials. Background technique [0002] With the development of science and technology and human civilization. The application and use of energy by human beings is increasing. Because various natural resources on the earth are limited, human beings are working hard to find various new energy sources to replace natural resources such as oil, natural gas, and coal; crystalline silicon solar cells are currently a relatively mature preparation technology with high photoelectric conversion efficiency. Green, environmentally friendly and clean new energy is also an inexhaustible and inexhaustible new energy. However, high-purity silicon for making solar cells is relatively scarce, and its purification technology is ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B28D5/00
Inventor 施美生戴士隽
Owner 上海九晶电子材料股份有限公司