Automatic balancing compensation lifting device used for silicon single crystal growth
An automatic balancing and compensating technology, which is applied in the directions of single crystal growth, crystal growth, self-melt pulling method, etc., can solve problems such as crystal shaking, unreasonable device structure setting, and affecting the quality of silicon single crystal growth. Smoothness, quality-enhancing effect
Inactive Publication Date: 2011-10-05
JIANGSU HUASHENG TIANLONG PHOTOELECTRIC
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Problems solved by technology
[0003] The purpose of the present invention is to provide an automatic balance compensation type lifting device for silicon single crystal growth, which solves the problem of unreasonable structure setting of the existing device, crystal shaking due to unbalance during the pulling and growing process of silicon single crystal, which affects silicon single crystal quality of growth
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[0017] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0018] like figure 1 , the structure of the self-balancing compensation type lifting device for silicon single crystal growth of the present invention includes a lifting part and a rotating part,
[0019] The lifting part includes a bottom plate 1, a reel box 2 and a fixed counterweight 19 are installed on the bottom plate 1, one end of the reel box 2 is provided with an end cover 13, and an observation window 21 is opened on the upper surface of the reel box 2 for use. Observe the situation in the reel box 2.
[0020] A support 4 is additionally installed on the casing of the reel box 2, and a rotating screw 6 and a guide rod 22 are arranged in parallel in the support 4, and a follow-up balance block 5 is sleeved on the rotating screw 6 and the guide rod 22 at the same time. , the rotating screw 6 and the follow-up balance block 5 are sleeve...
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The invention discloses an automatic balancing compensation lifting device used for silicon single crystal growth, comprising a vertical rotary principal axis. The horizontal end surface of the rotary principal axis is provided with a bottom board provided with a roll box and a support; a rotary screw rod and a guide rod are arranged in the support in parallel; the rotary screw rod and the guide rod are simultaneously sheathed with a follow-up balancing weight; the inner sides of two ends of the support are respectively provided with a limit switch; a rolling spline axis is installed in the roll box, and a rolling spline housing and a traction barrel are sheathed outside the rolling spline axis; the inner wall of the roll box is fixedly provided with a traction nut which is matched with the traction barrel by threads; a winding wheel covers the rolling spline axis and is fixedly connected with the traction barrel; a wire rope flexible axis is wound on the winding wheel; and one end ofthe rolling spline axis is provided with a tooth-form belt wheel which is respectively connected with a precise motor and a rotary screw rod. The device of the invention has simple structure, convenient operation and favorable balance in the technical process of silicon single crystal growth.
Description
technical field [0001] The invention belongs to the technical field of silicon single crystal production equipment, and relates to an automatic balance compensation type lifting device for silicon single crystal growth. Background technique [0002] Silicon single crystal is the main raw material for the manufacture of integrated circuits and solar cells. The growth of silicon single crystal is to put polycrystalline raw materials into a crucible in a vacuum studio, melt the raw materials through a heater, and then guide and pull up through a seed crystal. The method grows an ideal silicon single crystal; in the continuous upward pulling crystal growth process, in order to ensure the quality of the grown single crystal, the lifting device must maintain a stable rotational motion during the pulling growth process throughout the growth process. , which requires that the dynamic balance of the lifting device in the rotating motion is better, so as to ensure the stability of the...
Claims
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IPC IPC(8): C30B15/20
Inventor 李留臣
Owner JIANGSU HUASHENG TIANLONG PHOTOELECTRIC