Cross-scale biomimetic micro-nano branch structure array and preparation method thereof
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A branched structure, micro-nano technology, applied in the fields of micro-nano materials and robotics, can solve the problems of not achieving the adjustable parameters of the micro-nano structure, difficulty in ordering structure, and inability to meet the requirements of use.
Inactive Publication Date: 2010-07-14
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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However, because it is very difficult to assemble or grow nano-ordered structures in a fixed-point orientation on micro-structures, the array structures obtained in the prior art are either onl
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Embodiment 1
[0024] (1) The high-purity aluminum sheet is ultrasonically cleaned in acetone and ethanol in sequence to remove oil stains on the surface of the aluminum sheet.
[0025] (2) After drying the decontaminated high-purity aluminum flakes, 2 Or placed in a tube furnace in an inert atmosphere, and annealed at 500 ° C for 4 hours.
[0026] (3) The aluminum sheet after annealing is carried out electrochemical polishing in the mixed solution (ethanol:perchloric acid=9:1 volume ratio) of absolute ethanol and perchloric acid, with graphite as negative electrode, voltage is 20V, eliminates aluminum Scratches and oxide layers on the chip surface.
[0027] (4) Obtain a photoresist mask pattern on the surface of the aluminum sheet by ultraviolet lithography.
[0028] (5) Carry out argon ion beam etching on the aluminum sheet with a photoresist mask, the ion energy is 500eV, the ion beam is vertically incident, and the beam current density is 0.5mA / cm 2 , working pressure 2×10 -2 Pa, an ...
Embodiment 2
[0036] (1) The high-purity aluminum sheet is ultrasonically cleaned in acetone and ethanol in sequence to remove oil stains on the surface of the aluminum sheet.
[0037] (2) After drying the high-purity aluminum flakes after degreasing, in N 2 Or placed in a tube furnace in an inert atmosphere, and annealed at 500 ° C for 4 hours.
[0038] (3) The aluminum sheet after annealing is carried out electrochemical polishing in the mixed solution (ethanol:perchloric acid=9:1 volume ratio) of absolute ethanol and perchloric acid, with graphite as negative electrode, voltage is 20V, eliminates aluminum Scratches and oxide layers on the chip surface.
[0039] (4) Obtain a photoresist mask pattern on the surface of the aluminum sheet by ultraviolet lithography.
[0040] (5) Argon ion beam etching is carried out on the aluminum sheet with a photoresist mask, the ion energy is 600V, the ion beam incident angle is 30°, and the beam current density is 0.6mA / cm 2 , working pressure 2×10 ...
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Abstract
The invention discloses a cross-scale biomimetic micro-nano branch structure array and a preparation method thereof, which relate to the field of micro-nano materials and robots, particularly relate to a biomimetic adhesive material and a preparation method thereof and also relate to an electrochemical anodic oxidation process. The cross-scale biomimetic micro-nano branch structure array consists of a substrate and a micro-nano multilevel branch structure array, wherein the micro-nano multilevel branch structure array at least comprises a primary micron cylindrical structure array and a branch micro-nano cylindrical structure array. The preparation method thereof comprises the following steps of: firstly, etching an aluminum template with an argon ion beam to obtain an aluminum template with a primary micron hole array; secondly, preparing a micro-nano branch structure array in a definite point and direction on the template array by an electrochemical anodic oxidation process; thirdly, performing film extrusion and curing on the template by a polymer replica method; and finally, removing the template for forming to obtain the desired micro-nano structure array to form a biomimetic dry adhesive material. The cross-scale biomimetic micro-nano branch structure array and the preparation method thereof use electric characteristics to effectively solve the control problem of from micron to nanometer cross-scale branch structure arrays and have a great significance for the development of biomimetic adhesive materials and related dry biomimetic robots.
Description
Technical field: [0001] The invention relates to the fields of micro-nano materials and robots, in particular to a bionic adhesive material and a preparation method thereof, and also to an electrochemical anodic oxidation technology. Background technique: [0002] The miraculous ability of geckos to climb walls has attracted people to imitate them for thousands of years. The wall-climbing behavior of geckos is different from that of other insects or animals, leaving no mucus or scratch marks on the surface they have climbed. The crawling adhesion method of gecko toes, which can quickly adhere and detach on surfaces with various roughnesses, is called dry adhesion by researchers. The micro-nano structure of gecko's toe bristles is the secret to achieve rapid adhesion and detachment, and dry adhesion. The aggregation force of van der Waals force produced by this micro-nano structure array greatly exceeds the weight of its body many times. In 2000, Autumn and Full et al. rep...
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