Array with cross-scale biomimetic micro-nano branched structure and preparation method thereof

A branched structure, micro-nano technology, applied in the field of micro-nano materials and robotics, can solve the problems of not being able to meet the requirements of use, not achieving the adjustable parameters of the micro-nano structure, and difficulty in ordering the structure.

Inactive Publication Date: 2011-12-21
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, because it is very difficult to assemble or grow nano-ordered structures in a fixed-point orientation on micro-structures, the array structures obtained in the prior art are either only in the micro-scale range, or only in the nano-scale range, and have not reached the cross-scale micro-nano Structural parameters can be adjusted, so it cannot meet some specific requirements

Method used

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  • Array with cross-scale biomimetic micro-nano branched structure and preparation method thereof
  • Array with cross-scale biomimetic micro-nano branched structure and preparation method thereof
  • Array with cross-scale biomimetic micro-nano branched structure and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0024] (1) The high-purity aluminum sheet is ultrasonically cleaned in acetone and ethanol in sequence to remove oil stains on the surface of the aluminum sheet.

[0025] (2) After drying the decontaminated high-purity aluminum flakes, 2 Or placed in a tube furnace in an inert atmosphere, and annealed at 500 ° C for 4 hours.

[0026] (3) The aluminum sheet after annealing is carried out electrochemical polishing in the mixed solution (ethanol:perchloric acid=9:1 volume ratio) of absolute ethanol and perchloric acid, with graphite as negative electrode, voltage is 20V, eliminates aluminum Scratches and oxide layers on the chip surface.

[0027] (4) Obtain a photoresist mask pattern on the surface of the aluminum sheet by ultraviolet lithography.

[0028] (5) Carry out argon ion beam etching on the aluminum sheet with a photoresist mask, the ion energy is 500eV, the ion beam is vertically incident, and the beam current density is 0.5mA / cm 2 , working pressure 2×10 -2 Pa, an ...

Embodiment 2

[0036] (1) The high-purity aluminum sheet is ultrasonically cleaned in acetone and ethanol in sequence to remove oil stains on the surface of the aluminum sheet.

[0037] (2) After drying the high-purity aluminum flakes after degreasing, in N 2 Or placed in a tube furnace in an inert atmosphere, and annealed at 500 ° C for 4 hours.

[0038] (3) The aluminum sheet after annealing is carried out electrochemical polishing in the mixed solution (ethanol:perchloric acid=9:1 volume ratio) of absolute ethanol and perchloric acid, with graphite as negative electrode, voltage is 20V, eliminates aluminum Scratches and oxide layers on the chip surface.

[0039] (4) Obtain a photoresist mask pattern on the surface of the aluminum sheet by ultraviolet lithography.

[0040] (5) Argon ion beam etching is carried out on the aluminum sheet with a photoresist mask, the ion energy is 600V, the ion beam incident angle is 30°, and the beam current density is 0.6mA / cm 2 , working pressure 2×10 ...

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Abstract

The invention relates to the fields of micro-nano materials and robots, in particular to a bionic adhesive material and a preparation method thereof, and also to an electrochemical anodic oxidation technology. The cross-scale bionic micro-nano branch structure array is composed of a substrate and a micro-nano multi-level branch structure array, and the micro-nano multi-level branch structure includes at least one level of micro-cylindrical structure array and branched micro-nano cylinder structure array. The preparation method is to firstly use argon ion beam etching to obtain an aluminum template with a first-level micron hole array; then use electrochemical anodic oxidation to prepare a micro-nano branch structure array at a fixed point on the template array; and then use the polymer replica method In the template, a film is molded, solidified, and finally the template is removed for molding to obtain the required micro-nano structure array, which becomes a bionic dry adhesive material. The invention utilizes electric field characteristics to effectively solve the controllable problem of the cross-scale branch structure array from micron to nanometer, and has great significance for the development of bionic adhesive materials and related dry bionic robots.

Description

Technical field: [0001] The invention relates to the fields of micro-nano materials and robots, in particular to a bionic adhesive material and a preparation method thereof, and also to an electrochemical anodic oxidation technology. Background technique: [0002] The miraculous ability of geckos to climb walls has attracted people to imitate them for thousands of years. The wall-climbing behavior of geckos is different from that of other insects or animals, leaving no mucus or scratch marks on the surface they have climbed. The crawling adhesion method of gecko toes, which can quickly adhere and detach on surfaces with various roughnesses, is called dry adhesion by researchers. The micro-nano structure of gecko's toe bristles is the secret to achieve rapid adhesion and detachment, and dry adhesion. The aggregation force of van der Waals force produced by this micro-nano structure array greatly exceeds the weight of its body many times. In 2000, Autumn and Full et al. rep...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/00B82B3/00B81C3/00C25D11/08C25D11/12
Inventor 赵爱武梅涛王大朋李达
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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