Capacitance diaphragm gauge and vaccum apparatus

Abstract

A capacitance diaphragm gauge includes an inclination angle sensor which detects the inclination angle of the gauge. The pressure dependences of capacitance obtained when the capacitance diaphragm gauge is mounted on a vacuum apparatus at the first inclination angle (+90 DEG ), the second inclination angle (0 DEG ), and the third inclination angle (-90 DEG ) are stored in a storage unit in advance. A pressure measurement value is then corrected based on the inclination angle information detected by the inclination angle sensor and the capacitance-pressure characteristic data is actually measured at the first, second and third inclination angles, and stored in the gauge.

Description

technical field [0001] The present invention relates to a capacitive diaphragm vacuum gauge and a vacuum device for pressure measurement, in particular to a capacitive diaphragm vacuum gauge suitable for pressure measurement in a vacuum device such as a sputtering device or an etching device. Background technique [0002] Figure 5 is a view schematically showing a capacitive diaphragm vacuum gauge disclosed in the specification of US Patent No. 4,785,669. refer to Figure 5 , reference numeral 100 denotes a capacitive diaphragm vacuum gauge for measuring the pressure inside the vacuum device 2 ; and reference numeral 16 denotes a case covering the capacitive diaphragm vacuum gauge 100 . The case 16 contains the getter 13, the insulating member 6, the fixed electrode 5, the circuit board 9, and the like. [0003] The conductive housing 15 contains a reference pressure chamber (vacuum-sealed chamber) 1 which is sealed while being kept at a high vacuum by a getter 13 . The r...

AI Technical Summary

Problems solved by technology

This inevitably leads to an increase in the cost of the diaphragm vacuum gauge itself

Images