Preparation method of room-temperature alcohol thin film gas sensor
A gas sensor and alcohol technology, applied in the field of gas sensor preparation, can solve the problems of high working temperature, long response and recovery time, poor gas selectivity, etc., and achieve good sensitivity performance, short response and recovery time, and uniform particle size distribution Effect
Inactive Publication Date: 2012-09-12
HEILONGJIANG UNIV
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Problems solved by technology
[0003] The purpose of the invention is to solve the problems of long response and recovery time, poor gas selectivity, high working temperature and high minimum detection limit for alcohol gases in existing sensitive elements for measuring alcohol gases, and provide a Preparation method of room temperature alcohol thin film gas sensor
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specific Embodiment approach 1
[0008] Specific embodiment one: the room temperature alcohol thin film gas sensor of the present invention is made up of gold interdigitated glass substrate and oxide film, and the general formula of the oxide that constitutes oxide film is M x o y , wherein M is Cr, Ti, Zn, Fe, W or V, 1≤x≤2, 1≤y≤5, wherein x and y are integers.
specific Embodiment approach 2
[0009] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that the general formula of the oxide constituting the oxide film is CrO 3 . Others are the same as in the first embodiment.
specific Embodiment approach 3
[0010] Specific embodiment 3: The difference between this embodiment and specific embodiment 1 is that the general formula of the oxide constituting the oxide film is TiO 2 . Others are the same as in the first embodiment.
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Abstract
The invention discloses a room-temperature alcohol thin film gas sensor and a preparation method thereof, and relates to a gas sensor and a preparation method thereof. The invention solves the problems of long response and recovery time, poor gas selectivity, high working temperature, and high lowest detection limit for alcohol gases of conventional sensitive elements for measuring alcohol gases.The room-temperature alcohol thin film gas sensor consists of a gold interdigital glass substrate and an oxide film. The preparation method comprises the following steps: 1, preparing an oxide sol; 2, processing the gold interdigital glass substrate; 3, repeatedly operating for ten times according to the order in the step 2; and 4, sintering the gold interdigital glass substrate processed by the step 3 to obtain the room-temperature alcohol thin film gas sensor. The room-temperature alcohol thin film gas sensor has short response and recovery time, can selectively respond to the alcohol gases, and can detect the alcohol gases with the concentration of 2ppm at room temperature.
Description
technical field [0001] The invention relates to a preparation method of a gas sensor. Background technique [0002] At present, chemical gas sensors use semiconductor oxides as sensing materials. This kind of sensor generally operates at a temperature of 300-500 degrees and consumes a lot of energy, which limits its practical application in the portable field. Low-power, low-cost sensors that work at room temperature are urgently needed in the field of safety production and portable personal sensors. The metal oxide alcohol sensitive element materials that have been studied mainly focus on doped SnO 2 、In 2 o 3 , ZnSnO 3 and SmFeO 3 , and the detection gas is mostly ethanol gas. Literature reports Ag and Sb doped SnO 2 Under the heating voltage of 6V, the sensitivity of the sensitive element to 50ppm ethanol gas is 5 and 48 respectively; SmFeO 3 When the working temperature is 370 degrees, the sensitivity to 50ppm ethanol gas reaches about 55; while the composite oxi...
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IPC IPC(8): G01N27/406G01N27/407
Inventor 李强霍丽华程晓丽孙丽萍高山
Owner HEILONGJIANG UNIV