Oscillating structure and oscillator device using the same
A technology for oscillators and equipment, which is applied in the field of oscillatory structures and oscillator equipment using the oscillatory structure, can solve problems such as inconstant angular velocity, and achieve the effects of increasing the number of products, reducing costs, and reducing size
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Embodiment 1
[0040] refer to Figure 1A to Figure 5 , illustrating a first embodiment of an oscillating structure, an oscillator device, an optical deflecting device, and an imaging device according to the present invention. First, use Figure 1A to Figure 3B Structural features and operating principles of the oscillation structure and oscillator device of this embodiment will be described.
[0041] Figure 1A is a plan view showing an oscillating structure (for example, a micro oscillating structure) according to this embodiment. This oscillating structure 106 includes a pair of supporting members 101, a first oscillating member 102, a second oscillating member 103, a first torsion spring 104 (first elastic supporting member) constituted by a pair of springs, and a second torsion spring 105 (first elastic supporting member). Two elastic support components). Each spring of the first torsion spring 104 extends from the corresponding supporting member 101 to the first oscillating member 1...
Embodiment 2
[0070] A second embodiment will now be described. Its basic structure is the same as that of the first embodiment. refer to Figure 3A and 3B , to explain the operation of the oscillator device of the second embodiment.
[0071] In this embodiment, driving is performed based on a combination of the parallel mode and the reverse mode, such as Figure 3A The triangular waveform shown. The shape of the device, etc. can be designed to generate a parallel mode at sin(ω·t) and an inverse mode at sin(3·ω·t+π), multiply them by respective predetermined coefficients, add them to each other ( Equation 2). Also, assuming ω=2·π·f, it becomes possible to cause the second oscillating member 103 to generate a torsional oscillation having such Figure 3A The displacement angle of the chopped waveform is shown as a function of time. Also, f=1000 [Hz] is employed here.
[0072] f(t)=sin(ω·t)+0.06·sin(3·ω·t+π)...(2)
[0073] If we differentiate Equation (2), we can get Figure 3B The a...
Embodiment 3
[0076] refer to Figure 6 , illustrating an oscillation structure according to a third embodiment of the present invention. Figure 6 is a plan view showing the oscillation structure of this embodiment. In this embodiment, the first oscillating member 702 and the second oscillating member 703 are connected by two second torsion springs 705 . The supporting member 701 is connected to the first oscillating member 702 by the first torsion spring 704 . The supporting member 701 and the first torsion spring 704 are sandwiched by two second torsion springs 705 . The shape of this embodiment is effective when the deformation of the second oscillating member 703 during operation is to be reduced.
[0077] As mentioned above, in this embodiment, the second torsion spring 705 is composed of a plurality of springs, and the first torsion spring 704 is sandwiched by the second torsion spring 705 composed of a plurality of springs. The operation and advantageous features of this embodim...
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