Flatness absolute checking method based on oblique incidence

An inspection method and technology of oblique incidence, applied in the direction of instruments, measuring devices, optical devices, etc., can solve the problems of reducing test accuracy and unfavorable absolute inspection, and achieve the effect of improving test accuracy and avoiding space consistency errors

Inactive Publication Date: 2011-02-02
NANJING UNIV OF SCI & TECH
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Problems solved by technology

The above absolute inspection methods are all carried out under the condition of normal incidence. When the tested object is a high-reflectance optical plane, an additional light intensity attenuation...

Method used

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  • Flatness absolute checking method based on oblique incidence
  • Flatness absolute checking method based on oblique incidence
  • Flatness absolute checking method based on oblique incidence

Examples

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Embodiment

[0055] Use ZYGO GPI-XP interferometer to measure the absolute surface shape distribution of 90mm aluminum-coated mirror, and the working wavelength of the interferometer is λ=632.8nm. The laboratory temperature is 22°, and the temperature is constant for 10 days. Two quartz standard mirrors are used as the reference transmission plane and the reference reflection plane respectively. The two flat crystals have an effective diameter of 102mm and a thickness of 15mm.

[0056] Step 1: The working surface A of the reference transmissive flat 2 interferes with the working surface C of the reference reflective flat 4 to obtain wavefront data such as Figure 5 shown;

[0057] Step 2: The interferometer collimated wave surface mirror is reflected by the measured surface B after the reference transmission plane exits, and the incident angle is 45°. After self-collimation on the working surface C of the reference reflection plane 4, a test wave surface is formed, which is consistent wit...

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PUM

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Abstract

The invention discloses a flatness absolute checking method based on oblique incidence. In the method, three groups of wave surface data are obtained by the cavity interference of a Fizeau interferometer and twice oblique incidence measurement; wave surfaces are fitted by using a Zernike polynomial; and the absolute surface shape distribution of the whole plane is obtained by solving a rotating invariant and a rotating dependent variable of the surface to be detected. The invention simplifies the measuring step and shortens the measuring time and can obtain the absolute surface shape distribution of the plane to be detected only by measuring three times without disassembling and assembling a reference transmitting plane and is especially suitable for the surface shape absolute check of a high-reflectivity optical plane.

Description

technical field [0001] The invention belongs to the field of light interference measurement test, in particular to an absolute test method for flatness. Background technique [0002] The results of Fizeau interferometer detection of optical surfaces are restricted by the surface shape accuracy of the reference surface, and the absolute inspection of the tested part is required to deduct the influence of this aspect. The traditional three-face mutual inspection method performs two-by-two interference inspection on three planes to obtain the absolute profile on one diameter of the three faces. On this basis, one set of measured test faces can be rotated by a certain angle to increase the profile on one diameter. Error (1.G.Schulz and J.Schwider.Precise measurement of planeness[J].Appl.Opt, 1967, 6,1077-1084.2.G.Schulz and J.Schwider, Establishing anoptic flatness[J].Appl,Opt, 1971, 10, 929-934.). Fritz et al. added a rotation measurement to the traditional three-surface mutu...

Claims

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Application Information

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IPC IPC(8): G01B11/30G01B9/02
Inventor 陈磊韩志刚朱日宏何勇刘兆栋王青高志山梁奕瑾
Owner NANJING UNIV OF SCI & TECH
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