Method and device for obtaining high-power ultraviolet laser light

An ultraviolet laser and high-power technology, which is applied to lasers, laser components, phonon exciters, etc., can solve the problems of low frequency doubling conversion efficiency and easy damage to frequency doubling crystals, and achieve high frequency doubling conversion efficiency and increase the frequency Frequency conversion efficiency, the effect of high conversion efficiency

Active Publication Date: 2013-02-27
BEIJING ZK LASER
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Problems solved by technology

[0004] The purpose of the present invention is to overcome many shortcomings such as the low frequency doubling conversion efficiency of the method for obtaining all-solid-state high-power ultraviolet lasers in the prior art and the strong focused laser is easy to damage the frequency doubling crystal due to the increase in power density, and provides a method for obtaining high-power ultraviolet lasers. The method and device of power ultraviolet laser, the present invention utilizes a ring resonant cavity structure, recycles double frequency laser, effectively improves the conversion efficiency of triple frequency or quadruple frequency laser, thereby obtains high-power ultraviolet laser, this high-power Ultraviolet laser can be widely used in photolithography, fine material processing, medical treatment, spectral analysis, photobiology and other fields

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  • Method and device for obtaining high-power ultraviolet laser light
  • Method and device for obtaining high-power ultraviolet laser light
  • Method and device for obtaining high-power ultraviolet laser light

Examples

Experimental program
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Effect test

Embodiment 1

[0024] Embodiment 1, the 1064nm fundamental frequency light produced by the all-solid-state electro-optic Q-switched Nd:YVO4 laser 7 is quadrupled to obtain 266nm ultraviolet laser:

[0025] Such as figure 1 As shown, the ring resonator structure of this embodiment is composed of three resonator mirrors. The first resonator mirror 1 in the ring resonator structure is a flat-concave mirror with a radius of curvature of 200mm. 1064nm anti-reflective 532nm high-reflection coating; the normal of the first resonant cavity mirror 1 forms an angle of 30° with the optical axis of the 1064nm fundamental frequency light produced by the all-solid-state electro-optic Q-switched Nd:YVO4 laser 7 (θ 1 );

[0026] The second resonant cavity mirror 4 is a plano-concave mirror whose curvature radius is 200mm, and the transmittance is 95%. The line forms an angle of 30° with the optical axis of the 1064nm fundamental frequency light generated by the all-solid-state electro-optic Q-switched Nd:...

Embodiment 2

[0030] Embodiment 2, the all-solid-state electro-optic Q-switched Nd:YAG laser 7 generates 1064nm fundamental frequency light and triples the frequency to obtain 355nm ultraviolet laser:

[0031] Such as figure 1 As shown, the ring resonator structure is composed of three cavity mirrors. Choose KTP as the double frequency nonlinear optical crystal 2, the size is 3mm×3mm×10mm, both sides are coated with 1064nm and 532nm two-color anti-reflection coating;

[0032] Choose LBO as the frequency-tripling nonlinear optical crystal 3, with a size of 3mm×3mm×10mm, coated with 1064nm, 532nm and 355nm three-color anti-reflection coatings on both sides;

[0033] The first resonant cavity mirror 1 is a plano-concave mirror with a radius of curvature of 200mm. The plane is coated with a 1064nm anti-reflection coating, and the concave surface is coated with a 1064nm anti-reflective coating and a 532nm high-reflection coating. The optical axis of the 1064nm fundamental frequency light gener...

Embodiment 3

[0037] Embodiment 3: The 1053nm fundamental frequency light generated by the all-solid-state electro-optic Q-switched Nd:YLF laser 7 is tripled to obtain a 351nm ultraviolet laser:

[0038] Such as figure 2 As shown, the ring resonant cavity structure is composed of four resonant cavity mirrors, the first resonant cavity mirror 1 and the second resonant cavity mirror 4 are flat concave mirrors, the third resonant cavity mirror 5 and the fourth resonant cavity mirror 8 are planar mirrors ;

[0039] The normal of the first cavity mirror 1 and the optical axis of the 1053nm fundamental frequency light produced by the all-solid-state electro-optic Q-switched Nd:YLF laser 7 form an angle of 30° (θ 1 ), the radius of curvature is 200mm, the plane is coated with 1053nm antireflection coating, and the concave surface is coated with 1053nm antireflection and 527nm high reflection coating;

[0040] The normal line of the second cavity mirror 4 and the optical axis of the 1053nm funda...

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Abstract

The invention discloses a method for obtaining high-power ultraviolet laser light, which is realized by an annular cavity structure. The annular cavity structure is surrounded by at least three endoscopies, wherein the first endoscopy and the second endoscopy are oppositely arranged on the optical axis of an all solid-state laser, the normal lines of the first endoscopy and the second endoscopy and the optical axis respectively form an angle of 1-89 degrees; double frequency multiplication crystals and multiple frequency multiplication crystals are arranged between the first endoscopy and the second endoscopy; the other endoscopies are arranged above one side of the double frequency multiplication crystals and multiple frequency multiplication crystals; the third endoscopy is arranged on piezoelectric ceramics; base-frequency laser light emitted from the all solid-state laser is transmitted to the double frequency multiplication crystals to be subjected to double frequency multiplication by the first endoscopy, and triple frequency multiplication or quadruple frequency multiplication is carried out by the multiple frequency multiplication crystals to obtain the ultraviolet laser light; the double frequency multiplication laser light which is not converted is subjected to cycling frequency multiplication along each frequency multiplication crystal and each endoscopy in the annular cavity structure to generate high-power ultraviolet laser light; and the high-power ultraviolet laser light is output by any endoscopy. Thus, the double frequency multiplication laser is utilized by 100%, the ultraviolet conversion efficiency is improved, the crystal damage is avoided, and the high-power ultraviolet laser light can be obtained under certain injection power.

Description

technical field [0001] The invention relates to a method and device for obtaining ultraviolet laser, in particular to a method and device for obtaining high-power ultraviolet laser without strong focusing. Background technique [0002] Compared with traditional dye lasers, excimer lasers, and flash lamp-pumped solid-state lasers that generate ultraviolet laser light, LD-pumped all-solid-state lasers are small in size, low in price, high in efficiency, long in life, high in reliability, and good in beam quality. , stable power and easy maintenance, etc., have been widely used. Due to its short wavelength, small diffraction effect, high resolution and concentrated energy, ultraviolet laser has broad application prospects in precision material processing, ultraviolet curing, photolithography, spectral analysis, medical treatment and other fields. In recent years, people have continued to study ultraviolet laser As the technology continues to advance, the methods of obtaining u...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/083H01S3/109
Inventor 彭海波彭俊李培文陈凤萍
Owner BEIJING ZK LASER
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