Iris diaphragm

A diaphragm and variable technology, applied in the direction of aperture, optics, camera, etc., can solve the problems of small variable range and complex design of the iris diaphragm, and achieve the effect of simple structure, stable change of round hole, and easy processing

Active Publication Date: 2013-05-22
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the problems in the prior art that the variable range of the iris diaphragm is small and the design is complex, the present invention provides an iris diaphragm that can be changed in a larger range and has a relatively simple structure.

Method used

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Embodiment Construction

[0027] The present invention proposes a variable aperture, comprising: a support frame; a rotating disk connected to the support frame, a plurality of sliding grooves are arranged in the rotating disk, and the sliding grooves are involute arc sliding grooves; The mounting plate is connected to the rotating disk; the moving guide rail combination is fixed on the mounting plate; multiple sets of blade combinations are located on the moving guide rail combination, and the blade combinations are interlaced and superimposed on each other, and all adjacent ones Both ends of the blade combination are connected, and multiple groups of the blade combination form a ring structure, and the blade combination includes: a reinforcement plate; a blade connected to the reinforcement plate; a positioning plate connected to the blade; a connecting plate, and The positioning plate is connected; the guide rail sliding sleeve is connected with the connecting plate; the screw is fixed on the connect...

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Abstract

The present invention proposes a variable aperture, comprising: a support frame; a rotating disc connected to the support frame; a mounting plate connected to the rotating disc; a combination of moving guide rails fixed on the mounting plate; multiple sets of blades The combination is located on the moving guide rail combination, the blade combinations are interlaced and superimposed on each other, and the two ends of the adjacent blade combinations are connected, and multiple groups of the blade combinations form a ring structure; the positioning link is located on the between the moving guide rail assembly and the blade assembly, and are respectively connected to the moving guide rail assembly and the blade assembly; the rotating shaft assembly is located on the installation plate and on one side of the blade assembly. The variable range of the variable diaphragm provided by the invention is relatively large, which can reach more than 100mm; the circular hole of the diaphragm has higher roundness and higher precision; the blade structure is also relatively simple and easy to process.

Description

technical field [0001] The invention relates to the field of precision mechanical instruments, in particular to a variable diaphragm. Background technique [0002] The main purpose of the projection objective iris diaphragm is to control the size of the aperture (NA). In the exposure system, different imaging requirements correspond to different numerical apertures, and due to the field curvature of the diaphragm, the axial position of the diaphragm is different under different apertures. Therefore, in order to realize the above functions, it is necessary to design a mechanical mechanism that can automatically control the size of the aperture. [0003] It is mentioned in a US patent (patent number: US4460253) that the iris is composed of 6 blades with curved edges composed of different curvature radii, which can respectively rotate around the connecting fulcrums on the turntable. There is an arc chute track inside the blade, and the rotating shaft fixed on the turntable is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03B9/06
Inventor 王洪尊马很很储兆祥陈明杰
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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