Multichannel pulsed laser deposition method for preparing YSZ buffer layer

A laser coating and multi-channel technology, applied in the direction of coating, sputtering plating, ion implantation plating, etc., can solve the problems of limited space for improvement, short heater life, peeling, etc., to achieve superior surface quality, improve Effect of coating speed

Active Publication Date: 2011-11-23
SHANGHAI SUPERCONDUCTOR TECH CO LTD
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  • Abstract
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AI Technical Summary

Problems solved by technology

Although the first generation of high-temperature superconducting tapes has begun commercial production and has been applied in demonstration projects such as superconducting cables, it is still unable to be widely applied due to obstacles such as cost performance.
The main reasons are as follows: First, the first-generation high-temperature superconducting tapes represented by bismuth-based tapes cannot compare with yttrium-barium-copper-oxygen high-temperature superconducting tapes in terms of their superconducting current density and current transmission performance.
And after more than ten years of research and development, there is limited room for further improvement
Second, the superconducting current of the bismuth tape decays quickly in the magnetic field, that is, in the external magnetic field, when the magnetic field strength exceeds a certain value, it will lose its superconductivity
However, most applications in the energy and power fields are often related to strong magnetic fields, so the first generation of high-temperature superconducting tapes cannot be applied in most magnetic fields above medium strength
Third, because silver is a precious metal, the cost of raw materials is relatively high, so the cost of the first-generation bismuth-based high-temperature superconducting strips produced by the "silver-coated" method is difficult to reduce to a competitive level with traditional copper wires. price
When using the magnetron sputtering method to prepare the YSZ buffer layer, there are the following disadvantages: (1) The utilization rate of the target material is low (less than 50%)
(2) When using the magnetron sputtering method to prepare the YSZ buffer layer, due to the high temperature of the required metal baseband substrate, the life of the heater in the coating equipment is short
(3) The YSZ buffer layer prepared by the magnetron sputtering method has weak bonding force, sometimes peeling or even falling off
(4) Huge equipment
Not only the equipment is expensive, but also the vacuuming time is longer each time, which affects the production efficiency
(5) The yield is low
[0009] Although the laser coating method has the above advantages, when using the single-channel laser coating method, such as image 3 As shown, the metal base tape 1, the belt roll 2, the heater 3, the laser evaporation beam 5, and the YSZ laser evaporation target table 6 are only wound on the belt roll 2 by the metal base tape 1 once. Since the coating area is small, it is mainly used It is suitable for scientific research in the laboratory and cannot be applied to large-scale industrial production

Method used

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  • Multichannel pulsed laser deposition method for preparing YSZ buffer layer
  • Multichannel pulsed laser deposition method for preparing YSZ buffer layer
  • Multichannel pulsed laser deposition method for preparing YSZ buffer layer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] This embodiment provides a multi-channel laser coating method for preparing a YSZ buffer layer on a nickel-tungsten metal base band or a metal base band such as a Hastelloy band or a stainless steel band, comprising the following steps:

[0042] Step 1. Put the nickel-tungsten metal base belt or Hastelloy belt, stainless steel belt and other metal base belts that need to prepare the YSZ buffer layer into the coating chamber, and wind them on the belt roller of the metal strip transmission device of the multi-channel laser coating equipment for many times ; Before the coating starts, the background vacuum in the coating chamber is 5×10 -7 Torr;

[0043] Step 1.1, winding one end of the nickel-tungsten metal base tape on the first reel;

[0044] Step 1.2, pulling the nickel-tungsten metal base belt and winding it on the two rollers of the multi-channel transmission device multiple times;

[0045] Step 1.3, fixing the other end of the nickel-tungsten metal base tape on t...

Embodiment 2

[0055] This embodiment provides a multi-channel laser coating method for preparing a YSZ buffer layer on a nickel-tungsten metal base band or a metal base band such as a Hastelloy band or a stainless steel band, comprising the following steps:

[0056] Step 1. Put the nickel-tungsten metal base belt or Hastelloy belt, stainless steel belt and other metal base belts that need to prepare the YSZ buffer layer into the coating chamber, and wind them on the belt roller of the metal strip transmission device of the multi-channel laser coating equipment for many times ; Before the coating starts, the background vacuum in the coating chamber is 5×10 -6 Torr;

[0057] Step 2. Start the heater, press 10 o The heating rate of C / min raises the heater temperature to the set coating temperature, i.e., 800 o Between C;

[0058] Step 3. After the temperature of the heater is stable, open the oxygen channel; the flow of oxygen is controlled by the gas mass flow meter, and the oxygen flow ra...

Embodiment 3

[0066] This embodiment provides a multi-channel laser coating method for preparing a YSZ buffer layer on a nickel-tungsten metal base band or a metal base band such as a Hastelloy band or a stainless steel band, comprising the following steps:

[0067] Step 1. Put the nickel-tungsten metal base belt or Hastelloy belt, stainless steel belt and other metal base belts that need to prepare the YSZ buffer layer into the coating chamber, and wind them on the belt roller of the metal strip transmission device of the multi-channel laser coating equipment for many times ;

[0068] Before the coating starts, the background vacuum in the coating chamber is 1×10 -6 Torr;

[0069] Step 2. Start the heater, press 10 o The heating rate of C / min raises the heater temperature to the set coating temperature, i.e., 750 o Between C;

[0070] Step 3. After the temperature of the heater is stabilized, open the oxygen channel; the flow of oxygen is controlled by the gas mass flow meter, and the ...

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Abstract

The invention discloses a multichannel pulsed laser deposition method for preparing a YSZ buffer layer, which comprises the following steps of: arranging a nickel-tungsten metal base band, a Hastelloy band, a stainless steel band or other metal base bands in a deposition cavity, winding on a band roller of a metal band transmission device of multichannel pulsed laser deposition equipment for multiple times, and raising the temperature of a heater to deposition temperature; opening an oxygen channel; starting a YSZ target manipulator and beginning the x-direction and y-direction scanning and rotation of a YSZ laser evaporation target platform; opening an optical path window of a laser, and beginning pre-evaporating the YSZ target platform; beginning depositing; and making the metal base band pass through the heater for multiple times due to multiple winding of a roll shaft of the transmission device, and finally stopping corresponding equipment. The YSZ buffer layer is prepared by the multichannel pulsed laser deposition method, so that a defect of a small deposition area of a unichannel pulsed laser deposition method is overcome, the deposition speed is greatly improved, various advantages of the pulsed laser deposition method are exerted fully, and the prepared YSZ buffer layer has single orientation, high surface quality and high crystallinity.

Description

technical field [0001] The invention relates to the field of second-generation rare-earth oxide high-temperature superconducting strips, in particular to a multi-channel laser coating method for preparing a YSZ buffer layer on nickel-tungsten metal substrates, Hastelloy strips, stainless steel strips and other metal substrates. Background technique [0002] Since the discovery of new oxide high-temperature superconductors in 1986, the field has made great progress. But after several years of high-temperature superconducting heat, with the deepening of research work, it is found that the practical application of high-temperature superconducting materials is much more difficult than originally expected. This is mainly related to the microstructure and mechanical properties of high-temperature superconducting materials. Compared with traditional metal low-temperature superconductors, high-temperature superconductors belong to oxide materials, and their mechanical properties ar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/28C23C14/08H01L39/24
Inventor 李贻杰
Owner SHANGHAI SUPERCONDUCTOR TECH CO LTD
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