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11 results about "Laser evaporation" patented technology

Beamlines, laser systems and TLE systems for laser beams

The present invention relates to a beamline (10) for a laser beam (220) of a thermal laser evaporation (TLE) system (300), the beamline (10) extending between a source end (20) of the beamline (10) and a chamber end (30) of the beamline (10), such that the source end (20) is connectable to a laser light source (210) and the chamber end (30) is connectable to a reaction chamber (310) of the TLE system (300), the beamline (10) including one or more laser beam sources (210) for modifying and / or controlling the characteristics of the laser beam (220). and / or one or more linear guiding sections (52), each of the optical section (50) and the guiding section (52) having an upstream end (60) with a first connection interface (64), a downstream end (66) with a second connection interface (70), and a section cavity (56) extending continuously within the housing (54) from the first section opening (62) at the upstream end (60) to a second section opening (68) at the downstream end (66). The present invention further relates to a laser system (200) for a TLE system (300), the laser system (200) comprising a laser source (210) for providing a laser beam (220), and the beamline (10). The present invention further relates to a TLE system (300) comprising a reaction chamber (310) that can be filled with a reaction atmosphere (312), a substrate (316) disposed in the reaction chamber (310), one or more sources (314) disposed in the reaction chamber (310), and a laser system (200) for providing a laser beam (220) for evaporating and / or sublimating material from the sources (314) and / or for heating material from the substrate (316).
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

Hydrophilic sensor cap containing a DLC coating

Method for producing a hydrophilic cover layer (1) of a sensor membrane (2) which has a contact angle q of < 90° with water, comprising - providing a sensor membrane (2) comprising a medium-facing silicone film (3), - Coating the silicone film (3) with diamond-like carbon (DLC), wherein the coating step is selected from physical vapor deposition (PVD), chemical vapor deposition (CVD), for example by ECR (electron cyclotron resonance)-CVD, laser evaporation and sputtering, preferably magnetron sputtering, whereby a cover layer (1) is formed which, during operation, comes into contact with the medium and comprises the diamond-like carbon coating (5) and the silicone film (3), - Treating the cover layer (1) with a sterilizing agent.
Owner:ENDRESS HAUSER CONDUCTA GMBH CO KG

Method for using TLE system and TLE system

The invention relates to a method of using a thermal laser evaporation (TLE) system (10), the TLE system (10) comprising: a reaction chamber (12) fillable with a reaction atmosphere (14); a substrate (16) arranged in the reaction chamber (12); one or more sources (40) arranged in the reaction chamber (12), each source (40) comprising a source component (50) consisting of a source material (52); and a laser source (20) for providing a heating laser beam (22) that irradiates an upper surface (60) of the source assembly (50) with a heating spot (24) to vaporize or sublimate the source material (52) from an active area (62) on the upper surface (60) of the source assembly (50) to provide a flux (54) of the vaporized or sublimated source material (52) for deposition onto the substrate (16). Further, the invention relates to a thermal laser evaporation (TLE) system (10), the TLE system (10) comprising: a reaction chamber (12) fillable with a reaction atmosphere (14); a substrate (16) arranged in the reaction chamber (12); one or more sources (40) arranged in the reaction chamber (12), each source (40) comprising a source component (50) consisting of a source material (52); and a laser source (20) for providing a heating laser beam (22) that irradiates an upper surface (60) of the source assembly (50) with a heating spot (24) to vaporize or sublimate the source material (52) from an active area (62) on the upper surface (60) of the source assembly (50) to provide a flux (54) of the vaporized or sublimated source material (52) for deposition onto the substrate (16).
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

A smart dimming laminated vacuum composite roof glass structure and its preparation method

This invention provides an intelligent dimming laminated vacuum composite roof glass structure and its manufacturing method, comprising an outer tempered or semi-tempered glass, a film layer, an EC-coated glass, an edge sealing layer, and an inner vacuum glass layer, stacked sequentially from the outside of the roof to the inside of the vehicle. The EC-coated glass and the inner vacuum glass are edge-sealed by the edge sealing layer to form an EC-coated insulated glass structure. Then, a getter is activated by laser evaporation to adsorb air from the insulated glass structure, forming an EC-coated vacuum glass structure. The film layer is then laminated and fixed to the outer tempered or semi-tempered glass to form a laminated vacuum composite structure. Multiple vacuum support pillars are provided on the side of the inner vacuum glass facing the EC-coated glass to form and maintain the vacuum cavity. This invention uses vacuum glass to isolate external heat conduction, combined with the active modulation of visible light and infrared radiation by the EC-coated glass, to achieve intelligent temperature regulation, significantly improving driving comfort.
Owner:ANHUI ZHIGUANG NEW MATERIAL TECHNOLOGY CO LTD

Method for using TLE system and TLE system

The invention relates to a method of using a thermal laser evaporation (TLE) system (10), the TLE system (10) comprising: a reaction chamber (12) that can be filled with a reaction atmosphere (14); a substrate (16) arranged in the reaction chamber (12); one or more sources (40) arranged in the reaction chamber (12), each source (40) comprising a source component (42) consisting of a source material (44); and a laser source (20) for providing a laser beam (22) that impinges on the source assembly (42) to vaporize or sublimate the source material (44) to provide a flux (70, 72) of vaporized or sublimated source material (44) for deposition on the substrate (16). Further, the invention relates to a corresponding TLE system, the TLE system (10) comprising: a reaction chamber (12), which can be filled with a reaction atmosphere (14); a substrate (16) arranged in the reaction chamber (12); one or more sources (40) arranged in the reaction chamber (12), each source (40) comprising a source component (42) consisting of a source material (44); and a laser source (20) for providing a laser beam (22) that impinges on the source assembly (42) to vaporize or sublimate the source material (44) to provide a flux (70, 72) of vaporized or sublimated source material (44) for deposition on the substrate (16).
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

Evaporation coating device

The utility model relates to the field of evaporation coating, in particular to an evaporation coating device, which comprises an evaporation coating unit, a vacuum chamber and an evaporation coating unit, the evaporation coating unit enables evaporation substances evaporated from an evaporation coating source to be subjected to evaporation coating on a base film, and the vacuum chamber is used for setting a space for arranging the evaporation coating source and the base film and can keep the space in a vacuum state. And the laser evaporation unit is positioned in the vacuum chamber and is used for emitting high-power laser to evaporate the evaporation coating source. According to the device, a high-power laser beam is emitted through a laser emitter and is aligned with the surface of an evaporation coating source on a tray to perform scanning type irradiation, the surface layer of the evaporation coating source is evaporated through the laser beam, and an evaporation substance is deposited on the surface of a base film to form a thin film. According to the evaporation mode, resistance heating is not needed, splashing generated by corrosion of a resistance material and mixing of molten aluminum is reduced, poor products generated by resistance fluctuation in long-time production are reduced, and the yield of the products is greatly increased.
Owner:JIANGYIN NANOPORE INNOVATIVE MATERIALS TECH LTD

Beam line for laser beam, laser system and TLE system

The present invention relates to a beam line (10) for a laser beam (220) of a thermal laser evaporation (TLE) system (300), the beam line (10) extending between a source end (20) of the beam line (10) and a chamber end (30) of the beam line (10), whereby the source end (20) is connectable with a laser source (210) and the chamber end (30) is connectable with a reaction chamber (310) of the thermal laser evaporation system (300), the beam line (10) comprising: one or more optical sections (50), one or more linear guide sections (52) for changing and / or controlling properties of the laser beam (220), and / or one or more linear guide sections (52); wherein each optical section (50) and guide section (52) respectively comprise a housing (54) having an upstream end (60) comprising a first connection interface (64), a downstream end (66) comprising a second connection interface (70), and a section cavity (56) extending continuously within the housing (54) from a first section opening (62) located in the upstream end (60) to a second section opening (68) located in the downstream end (66). Furthermore, the invention relates to a laser system (200) for a thermal laser vapor deposition system (300), comprising a laser source (210) for providing a laser beam (220) and a corresponding beam line (10). Furthermore, the invention relates to a thermal laser vapor deposition system (300) comprising a reaction chamber (310) that can be filled with a reaction atmosphere (312); a substrate (316) disposed in the reaction chamber (310); one or more sources (314) arranged in the reaction chamber (310); and a corresponding laser system (200) for providing a laser beam (220) for evaporating and / or sublimating the material of the source (314) and / or heating the material of the substrate (316).
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

Substrate heating method, substrate heater and thermal laser evaporation system

The invention relates to a method for heating a substrate (20), in particular a substrate (20) of a thermal laser evaporation (TLE) system (10). Furthermore, the invention relates to a substrate heater (30) for heating a substrate (20), in particular a substrate (20) of a TLE system (10), comprising a laser light source (32) for providing a laser beam (34) and means for guiding the laser beam (34) to the substrate (20). Furthermore, the invention relates to a TLE system (10) comprising a reaction chamber (12) fillable with a reaction atmosphere (14), a substrate (20) disposed in the reaction chamber (12), one or more sources (16) disposed in the reaction chamber (12), and a substrate heater (30) for providing a laser beam (34) impinging on the substrate (20) to heat the substrate (20).
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

Method of using a TLE system and TLE system

The invention relates to a method of using a thermal laser evaporation (TLE) system. The TLE system comprising a reaction chamber fillable with a reaction atmosphere, a substrate arranged in the reaction chamber, and one or more sources arranged in the reaction chamber. Each source comprising a source element including a source material, and a laser source for providing a laser beam impinging on the source element and thereby evaporating or sublimating the source material for providing a flux of evaporated or sublimated source material for a deposition onto the substrate.
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

Beam line for a laser beam, laser system, and TLE system

PendingUS20260183874A1Laser sourceAtomic physics
The invention relates to a beam line for a laser beam of a thermal laser evaporation (TLE) system. The beam line extends between a source end of the beam line and a chamber end of the beam line. The source end is connectable to a laser source and the chamber end is connectable to a reaction chamber of the TLE system.
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

A composite board impregnation masking process

The present invention discloses a composite plate impregnation and masking process, comprising the following steps: step 1, affixing a protective film to the area of the plate to be impregnated; step 2, vapor-depositing thermal zirconium oxide using an evaporation device, and coating the area on the plate not covered by the protective film; step 3, tearing off the protective film on the surface of the plate after coating, and then starting the impregnation process; step 4, after the impregnation is completed, cooling and solidifying the coated zirconium dioxide, and then stripping after the curing is completed. The protective film in step 1 is provided with a hollow portion identical to the vapor-deposited area, and the vapor-depositing device in step 2 evaporates the zirconium dioxide by laser evaporation or magnetron sputtering, and then adheres to the area on the plate not blocked by the protective film. The present invention effectively improves the masking density, prevents the infiltration of dyeing liquid, does not leave residual offset, ensures the finished product effect, can effectively reduce manpower consumption, and improves work efficiency.
Owner:ZHEJIANG ZHAOYI OPTOELECTRONICS CO LTD