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Laser evaporation method and laser evaporation device for organic material film or organic-inorganic composite material film

An organic material, laser evaporation technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve the problems of runaway, uncontrollable film formation speed, pollution of other evaporation materials, etc. Achieve stable regulation and prevent pollution

Inactive Publication Date: 2019-08-23
NAT INST OF ADVANCED IND SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] The present invention is based on the prior art as described above, and its first problem is to solve the problems in the prior art such as contamination of other vapor deposition raw materials due to vaporization of organic materials, or loss of control due to uncontrollable film formation speed. In order to solve the problem in the present invention, provide an evaporation method and an evaporation device for an organic material capable of stably adjusting and controlling the film forming rate and the evaporation rate

Method used

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  • Laser evaporation method and laser evaporation device for organic material film or organic-inorganic composite material film
  • Laser evaporation method and laser evaporation device for organic material film or organic-inorganic composite material film
  • Laser evaporation method and laser evaporation device for organic material film or organic-inorganic composite material film

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Experimental program
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Effect test

Embodiment 1

[0079] (Embodiment 1)

[0080] In the vacuum chamber for evaporation, set PbI 2 and CH 3 NH 3 I as the target, and set for the PbI 2 and the CH 3 NH 3 A quartz vibrator film thickness gauge for measuring the evaporation rate of I (installed near the path of the evaporation flux to measure the film thickness of the vapor-deposited film. The same applies to the following quartz vibrator film thickness gauges). The laser evaporation apparatus was set up as follows: separately for PbI 2 By irradiating continuous laser light with a wavelength of 808nm, CH, which is a material with a high vapor pressure 3 NH 3 I irradiates pulsed laser light with a wavelength of 808 nm and modulated at 10 Hz.

[0081] Make the vacuum degree in the vacuum chamber be 10 -5 After Pa, about PbI 2 side of the laser, making its power up to 1.6W, on the other hand, on the CH 3 NH 3 The pulse amplitude of the I side laser was 17.9 W, the duty ratio was adjusted to 26%, and co-deposition was per...

Embodiment 2

[0083] (Example 2)

[0084] In the vacuum chamber for evaporation, set PbI 2 and CH 3 NH 3 I as the target, and set for the CH 3 NH 3 A quartz vibrator film thickness gauge for measuring the evaporation rate of I, the laser evaporation device is set as follows: for PbI 2 Without laser irradiation, for CH 3 NH 3 I irradiates pulsed laser light with a wavelength of 808 nm and modulated at 10 Hz.

[0085] Make the vacuum degree in the vacuum chamber be 10 -5 After Pa, for CH 3 NH 3 The pulse amplitude of the I-side laser was 17.9 W, and the duty ratio was adjusted to 40, 50%, and 60%, and vapor deposition was performed on the surface of a glass substrate. CH at this time 3 NH 3 The evolution of the evaporation rate of I is shown in image 3 middle. About CH 3 NH 3 For the evaporation rate of I, it can be seen that since the adjustment width of the duty ratio is as large as 10%, fluctuations accompanying the adjustment are observed, but the evaporation rate can be...

Embodiment 3

[0087] (Example 3)

[0088] In the vacuum chamber for evaporation, set PbI 2 and CH 3 NH 3 I as the target, and set for the PbI 2 and the CH 3 NH 3 A quartz vibrator film thickness gauge is used to measure the evaporation rate of I, and the laser evaporation device is set as follows: in PbI 2 and CH 3 NH 3 In the observation of the evaporation rate of I and the vacuum degree in the vacuum chamber, the PbI 2 Irradiate a continuous laser with a wavelength of 808nm and treat CH which is a material with a high vapor pressure 3 NH 3 I irradiates pulsed laser light with a wavelength of 808 nm and modulated at 10 Hz.

[0089] Make the vacuum degree in the vacuum chamber be 10 -5 After Pa, firstly, CH with high vapor pressure 3 NH 3 The amplitude of the laser pulse on the I side is gradually increased to allow the observation of CH 3 NH 3 The evaporation rate of I. Observe CH 3 NH 3 When the evaporation rate of I, gradually increase the duty cycle of the laser to in...

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Abstract

The object of the present invention is to solve the problems in the prior art such as contamination of other raw materials for evaporation due to gasification of organic materials, or loss of control due to uncontrollable film formation speed, and to provide a method that can stably adjust and control the deposition rate. A laser vapor deposition method and a laser vapor deposition device for an organic material with a film speed and an evaporation rate, in the method of carrying out laser vapor deposition of at least one organic material, it is characterized in that the duty ratio of the laser light that vaporizes the organic material is Make adjustments. In addition, it is characterized in that the above-mentioned duty ratio is adjusted based on the evaporation rate of the above-mentioned organic substance and the vapor pressure in the vacuum chamber for vapor deposition.

Description

technical field [0001] The present invention relates to the formation of organic lead perovskites (APbX) by laser evaporation 3 ; In the formula, A is an organic system cation, X is a film of organic materials such as halogen) and useful laser evaporation method, laser evaporation device. Background technique [0002] Using organolead perovskites (APbX 3 ) solar cells are rapidly becoming more efficient, and therefore, organic lead perovskites have attracted attention, and many various production methods have been reported. Among them, Non-Patent Document 1 describes that high solar cell efficiency can be obtained by utilizing the produced organolead perovskite produced by a co-evaporation method by heating with a heater. In addition, Patent Document 1 and Non-Patent Document 2 describe the formation of an organic-inorganic composite perovskite film containing an organic lead perovskite by co-evaporation. [0003] In order to form the film of organolead perovskite by co-e...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/28C23C14/12H10K99/00
CPCC23C14/28C23C14/12Y02E10/542H10K71/162H10K85/50H10K71/164H10K30/15H01G9/2009
Inventor 宫寺哲彦杉田武村上拓郎近松真之松原浩司
Owner NAT INST OF ADVANCED IND SCI & TECH
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