Scintillation screen structure for X-ray radiation detector

A radiation detector and scintillation screen technology, applied in the field of X-ray detectors, can solve problems such as poor performance, reduced image resolution, and low packaging process efficiency, and achieve excellent light transmittance, improved reflectivity, and excellent water resistance. The effect of waterproof performance

Active Publication Date: 2013-10-09
SHENZHEN BASDA MEDICAL APP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, cesium iodide is a hygroscopic material. When it absorbs moisture in the air and deliquesces, the characteristics of the scintillator, especially the image resolution, will be greatly reduced. Th

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] The X-ray radiation detector described in this embodiment uses a scintillation screen structure, and the substrate is polysilicon; a cesium iodide hybrid film is deposited on the polysilicon substrate by a laser evaporation process, and the cesium iodide hybrid film is doped A cesium iodide thick film doped with thallium and boron; and a transparent water-blocking film deposited on the cesium iodide thick film. The process of the laser evaporation is as follows: 99wt% CsI crystal powder, 0.98wt% TaI crystal powder and 0.02wt% B 2 o 3 After it is mixed evenly, it is pressed into a thin sheet as a target material; then a Nd:YAG laser is used, and the laser pulse power of the Nd:YAG laser is 10 7 W / cm 2 , the frequency is 2000Hz, the pulse width is 100ns, the scanning speed is 5-10 cm / s, the distance between the substrate and the target is 72.5 cm, the deposition temperature is 350°C, and the thickness of the deposited cesium iodide hybrid film is 0.5mm, where doped wi...

Embodiment 2

[0016] The X-ray radiation detector described in this embodiment uses a scintillation screen structure, and the substrate is polysilicon; a silicon dioxide transition layer is first deposited on the polysilicon substrate, and the silicon dioxide transition layer is deposited by a magnetron sputtering process , the conditions of the magnetron sputtering process are as follows: the target material is silicon dioxide; the sputtering gas is O 2 and Ar, O 2 The volume ratio of Ar and Ar is 1:5; the sputtering power density is 500 W, and the pressure of sputtering gas is 5×10 -3 Torr, the silicon substrate temperature is 80°C, and the deposition thickness is 200 nm. Then a cesium iodide hybrid film is deposited by a laser evaporation process, and the cesium iodide hybrid film is a cesium iodide thick film doped with thallium and boron; and a transparent water-blocking film is deposited on the cesium iodide thick film membrane. The process of the laser evaporation is as follows:...

Embodiment 3

[0018] The X-ray radiation detector described in this embodiment uses a scintillation screen structure, and the substrate is polysilicon; a silicon dioxide transition layer is first deposited on the polysilicon substrate, and the silicon dioxide transition layer is deposited by a magnetron sputtering process , the conditions of the magnetron sputtering process are as follows: the target material is silicon dioxide; the sputtering gas is O 2 and Ar, O 2 The volume ratio of Ar and Ar is 1:5; the sputtering power density is 300 W, and the pressure of sputtering gas is 3×10 -3 Torr, the silicon substrate temperature is 100°C, and the deposition thickness is 100 nm. Then, a cesium iodide hybrid film is deposited by a laser evaporation process, which is a cesium iodide thick film doped with thallium and boron; the process of the laser evaporation is as follows: 99wt% of the CsI crystal powder, 0.95wt% TaI crystal powder and 0.05wt% B 2 o 3 After it is mixed evenly, it is presse...

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Abstract

The invention relates to a scintillation screen structure for an X-ray radiation detector. The scintillation screen structure comprises a silicon substrate. A cesium iodide hybrid film is deposited on the silicon substrate through the laser evaporation process. The cesium iodide hybrid film is a cesium iodide thick film doped with thallium and boron. A transparent water blocking film is deposited on the cesium iodide thick film. The visible light transmittance of the transparent water blocking film is larger than or equal to 90%. The water vapor transmittance of the transparent water blocking film is smaller than or equal to 0.01g/m<-2>.day<-1>. The scintillation screen structure for the X-ray radiation detector is compact, even in component and good in cohesiveness with the substrate, and has good water blocking and waterproof performance.

Description

technical field [0001] The invention belongs to the technical field of X-ray detectors, and more specifically, the invention relates to a scintillation screen structure for X-ray radiation detectors. Background technique [0002] Since X-rays were discovered by Roentgen, with the advancement of research, its uses have become more and more extensive, from the initial X-ray photosensitive photos to later X-ray photodetection devices, from aerospace to high-energy physics, from military to From medical treatment to security inspection equipment, from production to life to scientific research and space exploration, this kind of ray is showing its unique charm more and more. [0003] Inorganic scintillators play a very important role in X-ray radiation detection and are widely used in imaging nuclear medicine, nuclear physics, high-energy physics, CT and security inspection and other fields. CsI:Tl is the inorganic scintillator most researched and used at present, because it not...

Claims

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Application Information

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IPC IPC(8): G01T1/202
Inventor 梁栌伊
Owner SHENZHEN BASDA MEDICAL APP
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