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Method for preparing silane with trichlorosilane

A technology of trichlorosilane and dichlorosilane, applied in the field of silicon purification, can solve problems limited to the laboratory stage, adsorption loss, instability, etc., achieve high utilization rate, increase conversion efficiency, and reduce process energy consumption Effect

Inactive Publication Date: 2013-05-08
BYD CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the instability in the preparation process of various improved catalysts, and the problems of adsorption loss and pollution of silane products on the catalyst carrier, the use of improved catalysts has been limited to the laboratory stage.

Method used

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  • Method for preparing silane with trichlorosilane
  • Method for preparing silane with trichlorosilane
  • Method for preparing silane with trichlorosilane

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] Purge the entire catalytic bed and each gas channel with nitrogen for 40 minutes, then evacuate to a pressure of 90 Pa; repeat the above operation 10 times.

[0067] Mix trichlorosilane gas and hydrogen gas at a molar ratio of 1:2, and then pass it into the catalytic bed through the gas inlet hole at the bottom of the catalytic bed at a flow rate of 1.5 L / min.

[0068] The catalytic bed is filled with an anion exchange resin with a height of 800 mm. The anion exchange resin is a macroporous anion exchange resin containing tertiary amine active groups (Amberlyst A-21). The average particle diameter of the anion exchange resin was 0.59 mm.

[0069] During the reaction, the reaction temperature of the catalytic bed was kept at 80° C. and the pressure at 10 bar.

[0070] The gas flowing out from the top of the catalytic bed is introduced into a rectification tower for rectification and separation to obtain dichlorosilane gas. And the other fractions are recycled.

Embodiment 2

[0072] The difference from Example 1 is that trichlorosilane and hydrogen are mixed in a molar ratio of 4:1. Other parts are with embodiment 1.

Embodiment 3

[0074] The difference from Example 1 is that trichlorosilane and hydrogen are mixed in a molar ratio of 1:6. Other parts are with embodiment 1.

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Abstract

A process for preparing silane from trichlorosilane is provided. The process comprises: reacting trichlorosilane with hydrogen in a first catalyst bed maintained at a temperature of from about 20 °C to about 100 °C to form a first product mixture comprising a dichlorosilane, and the first catalyst bed comprising a first anion exchange resin; separating the dichlorosilane from the first product mixture in a first distillation column; delivering the separated dichlorosilane from the first distillation column to a second catalyst bed maintained at a temperature of from about 20 °C to about 80 °C for a reaction with hydrogen to form a second product mixture comprising a silane, and the second catalyst bed comprising a second anion exchange resin; and separating the silane from the second product mixture in a second distillation column. Further, a system for preparing silane from trichlorosilane is also provided.

Description

technical field [0001] The invention belongs to the technical field of silicon purification, in particular to a method for preparing silane from trichlorosilane. Background technique [0002] As a key raw material gas in the electronics, semiconductor, and photovoltaic industries, silane is used in an increasingly wide range and in increasing amounts. [0003] At present, the method used by most domestic and foreign enterprises to prepare silane from trichlorosilane is the disproportionation method, that is, the UCC process. In the presence of a catalyst, trichlorosilane undergoes a heterogeneous reaction and is disproportionated to obtain dichlorosilane; dichlorosilane undergoes a heterogeneous reaction to disproportionate to obtain silane. The reactions involved in this process are as follows: [0004] 2 SiHCl 3 =SiH 2 Cl 2 +SiCl 4 [0005] 2 SiH 2 Cl 2 =SiH 4 +SiHCl 3 [0006] In the UCC process, the two-step reaction from trichlorosilane to silane is a revers...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/04
CPCC01B33/043
Inventor 丁显波
Owner BYD CO LTD