Production system for photovoltaic device,and production method for photovoltaic device

Abstract

A photoelectric conversion device manufacturing system in which a photoelectric conversion device is manufactured, the photoelectric conversion device includes a p-type semiconductor layer, an i-type semiconductor layer, and an n-type semiconductor layer which are sequentially layered on a transparent-electroconductive film formed on a substrate in the photoelectric conversion device. The system includes: an i-layer-formation reaction chamber comprising at least a first film formation section, a second film formation section, and a third film formation section, the i-layer-formation reaction chamber forming the i-type semiconductor layer, the first film formation section, the second film formation section, and the third film formation section being sequentially arranged along a transfer direction in which the substrate is transferred; and a plurality of door valves separating the first film formation section, the second film formation section, and the third film formation section so that the length of the second film formation section is greater than the lengths of the first film formation section and the third film formation section in the transfer direction.

Description

technical field [0001] The present invention relates to a manufacturing system of a photoelectric conversion device and a manufacturing method of a photoelectric conversion device. In particular, the present invention relates to a technique for obtaining good performance in a stacked photoelectric conversion device in which two photoelectric conversion units are laminated. [0002] this application claims priority based on Japanese Patent Application No. 2009-092455 for which it applied on April 6, 2009, and uses the content here. Background technique [0003] In recent years, photoelectric conversion devices have been widely used in solar cells, photosensors, and the like. In particular, solar cells have begun to be widely used from the viewpoint of efficient use of energy. [0004] In particular, a photoelectric conversion device using single crystal silicon is excellent in energy conversion efficiency per unit area. [0005] On the other hand, however, since a photoelec...

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Problems solved by technology

[0034] However, when the substrate is transferred between the reaction chambers, a pressure difference may be generated due to the opening and closing of the gate valve, and the pressure in the reaction chamber may become unstable.

[0035] In addition, if there is even a small pressure difference between the reaction chambers where the substrate is transferred, air flow will be generated when the gate valve is opened, and the film attached to the inner wall of the film formation chamber may be peeled off or particles may fly.

[0036] Furthermore, there are problems in that time loss (decrease in throughput) occurs due to the opening and closing operation of the gate valve, and that the equipment cost increases due to the installation of a chamber mechanism such as an exhaust mechanism in each reaction chamber.

In addition, there is the problem of increased risk of device failure

As a result, it is difficult to increase productivity

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