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Monolithic fbar-cmos structure such as for mass sensing

A technique for fabricating, resonator applications such as monolithic FBAR-CMOS structures for mass sensing that addresses marker indicator limitations, limiting specificity, etc.

Inactive Publication Date: 2015-02-11
THE TRUSTEES OF COLUMBIA UNIV IN THE CITY OF NEW YORK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, the limited cross-reactivity of fluorescently labeled general binders can limit the specificity of assays such as those used to analyze or characterize a variety of cells, biomarkers, autoimmune diseases, and proteins
Furthermore, the use of unbound labeled indicators can have limitations that prevent real-time detection and quantification of binding events, as unbound indicators must be washed prior to optical interrogation

Method used

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  • Monolithic fbar-cmos structure such as for mass sensing
  • Monolithic fbar-cmos structure such as for mass sensing
  • Monolithic fbar-cmos structure such as for mass sensing

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Embodiment Construction

[0045] In gravimetric biomolecular detection, specific antibodies, antibody fragments or nucleic acid probes can be immobilized on the surface of mechanical sensors such as mechanical resonators. Target molecules can be bound to immobilized detectors, further increasing the binding mass. In one example, mass sensing can be performed by electrically monitoring the resonant frequency of a lightweight, high-Q mechanical resonator, such as in contact with such a bonded material to be measured. The increase in mass at the surface of the resonator causes an overall decrease in the mechanical frequency, and thus the electrical resonance frequency, of the loading system, and this frequency can be measured and used to determine the increase in mass, as determined in real time as the bonded material accumulates, without requiring fluorescence mark.

[0046] Quartz crystal microbalances (QCMs) have been used, for example, to detect antibodies and antigens with sensitivity comparable to ...

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Abstract

An apparatus comprises a thin-film bulk acoustic resonator such as including an acoustic mirror, a piezoelectric region acoustically coupled to the acoustic mirror, and first and second conductors electrically coupled to the piezoelectric region. In an example, an integrated circuit substrate can include an interface circuit connected to the first and second conductors of the resonator, the integrated circuit substrate configured to mechanically support the resonator. An example can include an array of such resonators co-integrated with the interface circuit and configured to detect a mass change associated with one or more of a specified protein binding, a specified antibody-antigen coupling, a specified hybridization of a DNA oligomer, or an adsorption of specified gas molecules.

Description

[0001] claim priority [0002] U.S. Provisional Patent Application Serial No. 61 / 173,866 (Attorney Docket No. 2413.107PRV) filed April 29, 2009 and U.S. Provisional Patent Application Serial No. 61 / 215,611 (Attorney Docket No. 2413.107PV2), the entire contents of both applications are hereby incorporated by reference. [0003] Statement Regarding Federally Sponsored Research or Development [0004] This invention was made with Government support under Grant No. U01ES016074 from the National Institute of Environmental Health Sciences or the National Institutes of Health. The government has certain rights in this invention. [0005] Copyright Information [0006] Portions of the disclosure of this patent document contain copyrighted material. The copyright owner has no objection to the reproduction by anyone of the patent document or patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright whatsoever. Th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L47/00H10N80/00
CPCG01N2291/0256G01N29/2437H03H9/175G01N29/036G01N29/022H03H9/0557G01N2291/0426
Inventor 马修·约翰斯顿肯尼斯·谢巴德阿尼斯·卡米斯
Owner THE TRUSTEES OF COLUMBIA UNIV IN THE CITY OF NEW YORK