Probe card structure
A probe card and probe unit technology, applied in the field of probe cards, can solve problems such as affecting the contact state of the elastic probe, poor flatness of the substrate, easy deformation or damage of the substrate, etc.
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[0022] Such as figure 1 Shown is a cross-sectional view of the present invention. The probe card 1 of the present invention mainly includes a circuit board 2, an electrical connection device 3, a substrate 4, at least one probe unit 5, and a sealing rubber gasket 6.
[0023] The upper and lower surfaces of the circuit board 2 are formed with contact pads (not shown). The upper surface of the contact pad is electrically connected to the test head of a test device, and the lower surface of the contact pad is matched with the substrate 4 . The circuit board 2 is provided with at least one vacuum tube 21 penetrating the main body, and the position of the vacuum tube 21 is adjacent to or directly above the position of the substrate 4. The top of the vacuum tube 21 is connected to a vacuum pump via a pipeline, but it is not shown in the figure.
[0024] The electrical connection device 3 is arranged between the substrate 4 and the circuit board 2 as a signal transmission medium between...
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