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Deposition device and method of film pattern

A technology of thin film patterning and deposition equipment, which is applied in the field of thin film deposition equipment, and can solve the problems of mask cost increase and other issues

Active Publication Date: 2012-06-06
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, the mask cost will be greatly increased

Method used

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  • Deposition device and method of film pattern
  • Deposition device and method of film pattern
  • Deposition device and method of film pattern

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Embodiment Construction

[0024] Such as figure 1 As shown, it is a thin film pattern deposition device 100 in an embodiment, which has a cooling backplane 11 , an interposer 13 fixed under the cooling backplane 11 , a mask 15 , and a thin film deposition element 17 . The composition of the cooling backplane 11 can be high thermal conductivity materials such as gold, silver, aluminum and the like. The cooling backplane 11 can be connected to a cooling source such as a chiller or a refrigeration system to maintain a low temperature.

[0025] The interposer 13 has contrasting patterns of high thermal conductivity 13A and patterns of low thermal conductivity 13B, such as figure 2 shown. It is worth noting that the positions of the high thermal conductivity pattern 13A and the low thermal conductivity pattern 13B depend on the position of the deposited film on the substrate described later, and are not limited to figure 2 location shown. In one embodiment, the thermal conductivity of the high thermal...

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Abstract

The utility model discloses a deposition device and method of a film pattern. The deposition device of the film pattern is provided with a cooling back plate, a medium layer plate disposed under the cooling back plate, and a masking disposed under the medium layer plate. The medium layer plate is provided with an opening of a high heat conduction coefficient with respect to the masking, and an opening of a low heat conduction coefficient with respect to the masking. Thereby the thin film, which is deposited too thickly during the deposition process, can be prevented from covering on the masking, and the service lifetime of the masking can be prolonged, and the production technology costs can be reduced.

Description

technical field [0001] The invention relates to a thin film deposition device, in particular to a method for reducing mask loss. Background technique [0002] Organic electroluminescent displays have the advantages of self-luminescence, high response speed, wide viewing angle, power saving, high contrast, and no need for backlight plates, alignment films, polarizing films, and color filters, so they are considered to be the next generation of displays. development trend. However, there are still many problems to be solved in making organic electroluminescent displays with plastic substrates, especially the organic materials and metals in organic electroluminescent elements are quite sensitive to oxygen and moisture. Excessive permeation of water / oxygen will oxidize the metal of the element, reduce the electron injection in the structure of the organic electroluminescent display element, and then seriously affect its performance and life. Therefore, after the production is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C16/04
Inventor 王仪龙柯明贤张均豪庄传胜
Owner IND TECH RES INST