Small-scale liquid silicon tetrachloride quantitative feeding system and its control method
A technology of silicon tetrachloride and feeding system, which is applied in the direction of liquid flow control device, liquid distribution, liquid distribution, transportation or transfer device, etc., can solve the problem of low service life, high cost, and can not effectively prevent Solving problems such as corrosion of silicon carbide residue, to prevent corrosion, improve service life, and low cost
Inactive Publication Date: 2017-07-11
ORISI SILICON
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Problems solved by technology
Silicon tetrachloride by-products have become the main bottleneck restricting the development of polysilicon industry
However, the supply system in the prior art cannot fully realize the safe, quantitative and stable supply of silicon tetrachloride, and cannot effectively prevent the corrosion of the entire system by the residual silicon tetrachloride solution. The service life of the system is low and the cost is expensive.
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[0021] The small-scale liquid silicon tetrachloride quantitative feeding system provided according to the present invention includes a nitrogen cylinder 1, a gas flow meter 6, a silicon tetrachloride storage tank 2, a silicon tetrachloride buffer tank 3, a peristaltic pump 4, and reactor system 5. Specifically, the nitrogen cylinder 1 is connected to the gas flow meter 6 through the first valve 901 and the second valve 902 in sequence, and the gas flow meter 6 is connected to the four gas flow meters through the third valve 903 and the fifth valve 905 in sequence. Silicon tetrachloride storage tank 2, the silicon tetrachloride storage tank 2 is connected to the silicon tetrachloride buffer tank 3 through the sixth valve 906, the seventh valve 907, and the eighth valve 908 in sequence, the tetrachloride The silicon buffer tank 3 is connected to the inlet of the peristaltic pump 4 through the tenth valve 910, the second hose 602, and the first hose 601 in turn, and the outlet of...
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The invention provides a small-scale liquid silicon tetrachloride quantitative feeding system, which comprises a nitrogen cylinder, a gas flow meter, a silicon tetrachloride storage tank, a silicon tetrachloride buffer tank and a peristaltic pump sequentially connected through pipelines and valves. A corresponding control method is also provided, comprising the following steps: step 1: purging the gas circuit system; step 2: feeding the buffer tank; step 3: feeding the silicon tetrachloride system. The invention fully realizes the safe, quantitative and stable supply of silicon tetrachloride. The invention is beneficial to the quantitative control related to the silicon tetrachloride reaction and production application, and the manufacturing cost is low. At the same time, the design of the gas path enables nitrogen purging to effectively prevent the silicon tetrachloride residue from corroding the entire system, thus prolonging the service life of the system.
Description
technical field [0001] The invention relates to a silicon tetrachloride feeding system, in particular to a small-scale liquid silicon tetrachloride quantitative feeding system. Background technique [0002] The current polysilicon production process is mainly based on the improved Siemens method, and silicon tetrachloride is the main by-product. Conservatively calculate that for every 1KG of polysilicon produced, 10KG of silicon tetrachloride is produced as a by-product. The by-product of silicon tetrachloride has become the main bottleneck restricting the development of polysilicon industry. Silicon tetrachloride is a corrosive, dangerous and harmful liquid. The transformation and reasonable recycling of silicon tetrachloride has become a hot spot in research and development and technological transformation. These include the hydrogenation conversion of silicon tetrachloride to trichlorosilane, which in turn includes the thermal hydrogenation conversion of silicon tetrachl...
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IPC IPC(8): B67D99/00
Inventor 贺珍俊张愿成郭飞
Owner ORISI SILICON