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Preparation method of nano capacitor

A capacitor and nanotechnology, applied in the direction of capacitors, fixed capacitors, fixed capacitor electrodes, etc., can solve the problem of not being able to store more energy, achieve the effects of easy operation, reasonable and simple preparation method, and increase energy density

Inactive Publication Date: 2014-09-24
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current nanocapacitor array cannot store much energy due to its small size. At the same time, there are certain problems in the interconnection of multiple array structures. How to ensure the expansion of the ratio and the normal operation of all capacitors remains to be further studied.

Method used

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  • Preparation method of nano capacitor

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] exist figure 1 The middle LB film tank is an ultrapure aqueous solution. When a certain concentration of Au hollow nanoparticles / n-butanol solution is added to the surface of the ultrapure aqueous solution, the Au nanoparticles can be effectively assembled at the gas / liquid interface. Finally, control the sliding barrier to compress the nanoparticles at a certain speed, keep the film pressure constant for a period of time after reaching the required surface pressure, and then control the substrate to transfer the hollow metal nanoparticle LB film to the surface of the conductive substrate at a certain speed.

[0042] exist figure 2 In the method, the substrate deposited with hollow metal nanoparticles is placed in the cavity of the atomic deposition equipment, and the capacitor is obtained by the atomic deposition method ( figure 2 Middle 6).

[0043] exist figure 2 In this process, an ultra-thin metal film is prepared on the surface of the ultra-thin nano-dielect...

Embodiment 2

[0052] like figure 2 , the nanoparticles are metallic Au hollow nanoparticles.

[0053] The manufacturing process of the nanocapacitor is similar to that of Embodiment 1. In the process of transferring the nanoparticles to the substrate, two layers of nanoparticles are transferred to the substrate to form a capacitor array structure of two layers of hollow nanoparticles.

[0054] 2 layers of hollow Au nanoparticles-Al 2 o 3 -TiN nanocapacitor array.

Embodiment 3

[0056] like figure 2 , the nanoparticles are metallic Ag hollow nanoparticles.

[0057] The preparation process of the nanocapacitor is similar to that of Embodiment 1. Since the nanoparticles are metal tantalum nanoparticles, a single layer of Ag nanoparticles-Al 2 o 3 - Nanocapacitors with TiN structure

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Abstract

The invention discloses a method for preparing a nanocapacitor. Firstly, a high-density hollow nanoparticle film is prepared on a substrate by the Langmuir-Blodgett (LB) film method as an electrode of the capacitor, and then the atomic deposition (ALD) method is used on the surface of the hollow nanoparticle. The dielectric nano film is deposited as the capacitor dielectric material, and finally the metal nano film is deposited on the dielectric film by ALD method as the other electrode of the capacitor to form a metal-insulator-metal nano capacitor structure. The nanocapacitor prepared by the method and the array technology overcome the defects in the prior art, and the preparation method is reasonable and simple, and is easy to operate.

Description

Technical field [0001] The invention involves the field of electronic material components, which specifically involves a preparation method based on high -density metal hollow nanoparticles. Background technique [0002] With the development of social science and technology for efficient and clean sources, the development of long cyclic cycles, high -energy storage density energy storage devices have always been a hot spot for researchers in many fields.As a component that occupies the maximum proportion of weight and volume in the energy system, its energy storage density is of great significance. The development of new energy storage devices supports the development of energy systems to miniaturize and lightweight. [0003] Compared with electrochemical capacitors, the current energy density of static capacitors is low. On the one hand, the work mechanism limits its energy density to further increase. On the other hand, it is difficult to obtain a high -ratio capacitor structur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01G4/00H01G4/005H01G4/06
Inventor 杨亚杰蒋亚东徐建华杨文耀
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA