Preparation method of nano capacitor
A technology for capacitors and capacitor structures, applied in the direction of capacitors, fixed capacitors, fixed capacitor electrodes, etc., can solve the problem of not being able to store more energy, achieve the effects of easy operation, reasonable and simple preparation method, and increase energy density
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Embodiment 1
[0041] in figure 1 The medium LB membrane tank is an ultra-pure aqueous solution. When a certain concentration of Au hollow nanoparticles / n-butanol solution is added to the surface of the ultra-pure aqueous solution, the Au nanoparticles can be effectively assembled at the gas / liquid interface until the n-butanol evaporates Then control the sliding barrier to compress the nanoparticles at a certain speed, and keep the film pressure constant for a period of time after reaching the required surface pressure, and then control the substrate to transfer the hollow metal nanoparticle LB film to the surface of the conductive substrate at a certain speed.
[0042] in figure 2 In, the substrate deposited with hollow metal nanoparticles is placed in the cavity of the atomic deposition equipment, and the capacitor is obtained by the atomic deposition method ( figure 2 Middle 6).
[0043] in figure 2 In the method, an ultra-thin metal film is prepared on the surface of the ultra-thin nano-di...
Embodiment 2
[0052] Such as figure 2 , The nanoparticles are metal Au hollow nanoparticles.
[0053] The preparation process of the nanocapacitor is similar to the first embodiment. In the process of transferring the nanoparticles to the substrate, two layers of nanoparticles are transferred to the substrate to form a capacitor array structure of two layers of hollow nanoparticles.
[0054] Thus, two layers of hollow Au nanoparticles-Al 2 O 3 -TiN nano capacitor array.
Embodiment 3
[0056] Such as figure 2 , The nanoparticles are metallic Ag hollow nanoparticles.
[0057] The preparation process of the nanocapacitor is similar to the first embodiment. Because the nanoparticles are metal tantalum nanoparticles, a single layer of Ag nanoparticles-Al is obtained. 2 O 3 -TiN structure nanocapacitor
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