Three-dimensional controllable mobile bench of X-ray scatterometer and light scatterometer imaging plate detector

Abstract

The invention discloses a three-dimensional controllable mobile bench of an X-ray scatterometer and light scatterometer imaging plate detector. The mobile bench is characterized in that the mobile station comprises a pedestal, a dovetail slide carriage, a lifting table, a translation table, a right angle block, and an imaging plate fixer; the dovetail slide carriage is arranged on the upper portion of the pedestal, the pedestal is provided with a dovetail boss which is provided with scales, and the dovetail boss slidingly fits with the dovetail of the dovetail slide carriage; the top of the dovetail slide carriage is fixedly connected with the lifting table; the top of the lifting table is fixedly connected with the translation table; and the table surface of the translation table is fixedly provided with the right angle block, and the side wall of the right angle block is fixedly connected with the imaging plate fixer. The mobile bench which is an accessory of a small angle X-ray scatterometer or a light scatterometer has the advantages of compact and reasonable structure, convenient and fast imaging plate mounting and dismounting, easy correction, and accurately adjustable distance between the imaging plate and a fixed sample, so the mobile bench can be accurately adjusted according to different measure ranges of the sample to obtain required data and improve the analytic precision.

Description

technical field [0001] The invention relates to a three-dimensional controllable mobile platform of an imaging plate detector of an X-ray diffractometer and a light scattering instrument, which is an accessory used on an X-ray diffractometer or a light scattering instrument, and the detector can be conveniently adjusted by using the mobile platform position to realize observation of different structure sizes and realize simultaneous SAXS / WAXS functions. Background technique [0002] When using a two-dimensional X-ray scattering instrument or a light scattering instrument for measurement, the size range of the observed structure is determined by the distance between the sample and the detector and the detection area of ​​the detector. Taking the small-angle X-ray scattering instrument as an example, the current small-angle X-ray scattering (SAXS) instrument with the image plate (Image Plate) as the detector (such as the wide-angle scattering detector part of the Rigaku SMax30...

AI Technical Summary

Problems solved by technology

Taking the small-angle X-ray scattering instrument as an example, the current small-angle X-ray scattering (SAXS) instrument with the image plate (Image Plate) as the detector (such as the wide-angle scattering detector part of the Rigaku SMax3000 scatterometer) has the following disadvantages: 1 1. The observation range is narrow and very limited, and even the requirements of the middle angle X-ray scattering experiment are difficult to meet; 2. Since the distance between the sample and the detector is fixed and small, it is difficult to achieve different sizes of samples Two-dimensional wide-angle experiments with stages and accessories (e.g., thermal stages, stretching stages, etc.), such as figure 1 shown

In addition, if synchronous SAXS / WAXS is realized in the small angle X-ray scattering instrument, a dedicated Load / Lock device for the imaging plate detector is required. The disadvantage is that it occupies a large space and the distance between the sample and the detector is fixed, that is, the detection range is fixed.

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