Probe measuring device

Abstract

A probe measuring device in which a probe is supported by a Y-axis stage (4) supported via a linear guide by a beam (32) at the top of a portal frame that moves freely in the X-axis direction relative to an object to be measured, wherein deterioration in measurement accuracy due to abrasion of the linear guide is prevented. The linear guide is composed of a pair of guide rails (51, 52) fixed to the undersurface of the beam (32), and a pair of linear-motion bearings (53, 54) that come into moveable contact with guide surfaces (51a, 52a), which are inclined relative to the vertical plane of the guide rails (51, 52). One of the linear-motion bearings (54) is made to float freely in the X-axis direction and the vertical direction relative to the Y-axis stage (4). An urging means (55), which urges the linear-motion bearing (54) in the X-axis direction in such a manner as to press the bearing against the guide surface (52a) of the guide rail (52), is disposed on the Y-axis stage (4), a second urging means (56), which urges the linear-motion bearing (54) downward, is disposed on the beam (32) side, and the direction of the vector of the resultant force of the urging forces of both urging means (55, 56) is thereby made to coincide with the normal direction of the guide surface (52a).

Description

technical field [0001] The present invention relates to a stylus-type measuring device for measuring the surface shape of an object to be measured, which has a stylus that contacts the surface of the object to be measured. Background technique [0002] Conventionally, there is known a stylus-type measuring device that uses two horizontal directions perpendicular to each other as the X-axis direction and the Y-axis direction, and has the ability to move relatively freely in the X-axis direction with respect to the object to be measured. The door-shaped frame; the Y-axis table that moves freely in the Y-axis direction is supported by the beam in the Y-axis direction at the upper end of the frame through the linear guide; the contact that will be used to contact the surface of the measured object The needle is supported on a Y-axis stand (for example, refer to Patent Document 1). [0003] In addition, in the structure described in Patent Document 1, the linear guide adopts a s...

AI Technical Summary

Problems solved by technology

[0005] However, in the static pressure type guide, after a certain period of use, wear of the guide surface of the guide rail and the contact surface of the linear motion bearing occurs, creating a gap between the two

In addition, the Y-axis table is displaced in the vertical direction by the amount of the gap, and the vertical position of the support part for the stylus provided on the Y-axis table deviates from the normal position, which deteriorates the measurement accuracy.

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