Clean room

Abstract

Provided is a clean room wherein a necessary speed of a down flow can be ensured even if a circulating air volume is small, and furthermore, filter leak test can be easily performed. Ports for blowing out temperature-controlled cleaned air to the clean zone (11) in a clean room (10) are formed using a plurality of plate nozzles (20).

Description

technical field [0001] The present invention relates to a clean room used in semiconductor manufacturing, liquid crystal substrate manufacturing, pharmaceutical and food manufacturing, etc., and particularly relates to a clean room with an improved outlet for discharging clean air with a fine temperature adjustment to the clean area. Background technique [0002] In manufacturing plants such as semiconductor manufacturing, liquid crystal substrate manufacturing, pharmaceuticals and food manufacturing, etc., the entire building is made into a clean room. [0003] As a clean room, there is Figure 8 The unidirectional flow shown (laminar flow) and Figure 9 The two methods shown are non-unidirectional (turbulent flow). [0004] Figure 8 The illustrated unidirectional flow type clean room 40 is configured such that an air supply chamber 42 is provided across substantially the entire surface of the ceiling of a clean area 41 in which the manufacturing equipment M is installed,...

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Problems solved by technology

However, in the case of non-unidirectional type, even if the supply air temperature is controlled in order to deal with the heat load required in the clean area 41, there is a difference between directly below the filter unit 51 and outside it. Temperature Distribution

[0008] In order to control the diffusion of the particles generated in the clean area 41 and remove the heat from the equipment of the manufacturing facility M, etc., the face velocity of the downflow needs to be 0.15 to 0.5 m / sec. Figure 8 In the unidirectional flow type, there is a problem that a large amount of air circulation is required

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