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Flexible element for micropump

A technology of micro-pumps and components, which is applied in the direction of pumps with flexible working components, pumps, liquid displacement machines, etc., and can solve problems such as providing effective connections for difficult actuators

Inactive Publication Date: 2015-04-22
DEBIOTECH SA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The problem that the present invention proposes to solve is the difficulty of providing an effective connection between the membrane and the actuator which deforms when activated

Method used

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  • Flexible element for micropump
  • Flexible element for micropump
  • Flexible element for micropump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0041] figure 1 The micropump shown in is formed from components that are preferably silicon and glass. It is produced by micromachining techniques known per se. It comprises in particular a base plate 12 of glass, a support plate 1 of silicon, a flexible membrane 2 of silicon, a plenum chamber 4 and a blanking plate 3 of glass, the plenum chamber 4 being defined between the membrane 2 and the blanking plate 3 .

[0042] A more detailed description of the construction and operation of such a pump is found in US Pat. No. 5,758,014.

[0043] Piezoelectric element 5 ( figure 1 (not shown in ) is fixed to the transport block 13 machined in the support plate 3 .

[0044] figure 2 is a schematic cross-sectional view of a variant of the present invention.

[0045] A voltage applied to the fixed end 8 of the piezoelectric element 5 induces its contraction, which contraction is reflected in a circular motion of its free end 9 . The maximum displacement of the piezoelectric eleme...

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PUM

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Abstract

The micro-pump has a pumping chamber (4) communicating with exterior via a flexible diaphragm (2). The diaphragm is secured to an actuator (5) e.g. piezoelectric bi-morph or multi-morph actuator or shape memory alloy actuator, arranged at the exterior of the micro-pump. The diaphragm is secured to the actuator by an element that is in the form of a strip (6), which is rigid along its main axis and flexible in the direction perpendicular to the main axis, where the strip is made of stainless steel. The actuator has a fixed end (8) fixed on a rigid support plate (11) that is made of ceramic.

Description

technical field [0001] The invention relates to micropumps obtained by micromachining, which are suitable for activation by means of actuators such as piezoelectric elements. Background technique [0002] Such devices are particularly described in International Patent Application WO2006 / 056967. [0003] These devices generally take the form of a stack, ie a support plate, an intermediate layer acting as a flexible membrane, a plenum chamber and a blanking plate, the plenum chamber communicating with the outside, for example by means of the support plate. Part of the membrane is fixed to a piezoelectric element located outside the device. The connection between these two elements is provided by means of at least one element, for example a block produced in the support plate by micromachining. Contents of the invention [0004] The problem that the present invention proposes to solve is that it is difficult to provide an effective connection between the membrane and the ac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B43/04
CPCF04B43/046F04B43/043F04B19/006
Inventor 尼克劳斯·施尼博格埃里克·查佩尔
Owner DEBIOTECH SA