Flexible element for micropump
A technology of micro-pumps and components, which is applied in the direction of pumps with flexible working components, pumps, liquid displacement machines, etc., and can solve problems such as providing effective connections for difficult actuators
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[0041] figure 1 The micropump shown in is formed from components that are preferably silicon and glass. It is produced by micromachining techniques known per se. It comprises in particular a base plate 12 of glass, a support plate 1 of silicon, a flexible membrane 2 of silicon, a plenum chamber 4 and a blanking plate 3 of glass, the plenum chamber 4 being defined between the membrane 2 and the blanking plate 3 .
[0042] A more detailed description of the construction and operation of such a pump is found in US Pat. No. 5,758,014.
[0043] Piezoelectric element 5 ( figure 1 (not shown in ) is fixed to the transport block 13 machined in the support plate 3 .
[0044] figure 2 is a schematic cross-sectional view of a variant of the present invention.
[0045] A voltage applied to the fixed end 8 of the piezoelectric element 5 induces its contraction, which contraction is reflected in a circular motion of its free end 9 . The maximum displacement of the piezoelectric eleme...
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