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High-precision x-ray microscope sample scanning table with metering rotary shaft

A sample stage, X-ray technology, applied in the field of high-precision X-ray microscope scanning sample stage, can solve problems such as distortion

Active Publication Date: 2012-09-26
天津三英精密仪器股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing scanning sample stage does not consider the impact of these five errors on image reconstruction, resulting in a certain distortion between the scanning result and the actual structure of the scanned object

Method used

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  • High-precision x-ray microscope sample scanning table with metering rotary shaft
  • High-precision x-ray microscope sample scanning table with metering rotary shaft
  • High-precision x-ray microscope sample scanning table with metering rotary shaft

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Experimental program
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Effect test

Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with specific embodiments.

[0018] refer to Figure 2 ~ Figure 4 The scanning turntable 2 is installed on the fixed base 1, and the driving device of the scanning turntable 2 is installed outside the fixed base 1, which can drive the scanning turntable 2 to rotate. A three-dimensional positioning platform 6 is fixedly installed on the top of the scanning turntable 2. The three-dimensional positioning platform 6 includes three platforms that can move freely along the x, y, and z directions respectively. The x-direction platform can move along the guide rail fixedly installed on the z-direction platform, and the y-direction platform can move along the guide rail fixedly installed on the x-direction platform. By adjusting the positions of the three platforms, the precise positioning of the sample scanning position in three directions can be realized. The sensor mounting seat 3 is installed on the out...

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Abstract

The invention discloses a high-precision x-ray microscope sample scanning table with a metering rotary shaft. A scanning rotary table (2) is arranged on a fixed base (1); a drive device of the scanning rotary table (2) is arranged outside the fixed base (1) and is used for driving the scanning rotary table (2) to rotate; a three-dimensional positioning platform (6) is fixedly arranged on the upper part of the scanning rotary table (2); a sensor installation seat (3) is arranged outside the fixed base (1); a Z-direction run-out error measuring sensor (4), an X-direction run-out error measuring sensor (8), a first swing error measuring sensor (5), a second swing error measuring sensor (7) and a third swing error measuring sensor (9) are respectively arranged on the sensor installation seat (3); the error correction is carried out on the scanning rotary table (2) by using an active correction control method according to the size of the errors measured by each sensor, and the run-out error correction is also can be carried out in a three-dimensional image reconstructing process by using a mathematical algorithm, so that a scanned image distortion problem caused by position error precision of the rotary table rotary shaft can be reduced or eliminated.

Description

technical field [0001] The invention belongs to the technical field of micro-CT scanning imaging, in particular to a high-precision X-ray microscope scanning sample stage with a measuring rotating shaft. Background technique [0002] In recent years, micro-CT technology has received increasing attention in the fields of scientific research and industry, and its application fields cover new materials, semiconductors / microelectronics, petroleum / mining / geology, archaeology / cultural relics, biology / medicine, life sciences, food testing, space technology , military / defense and other fields. Therefore, the product has a huge potential market size. [0003] Due to the penetrating characteristics of x-rays, it is possible to measure the internal structure of complex parts. It just makes up for the inherent deficiency that traditional precision measuring instruments such as three-coordinate measuring machines can only measure external dimensions. [0004] figure 1 Schematic diagr...

Claims

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Application Information

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IPC IPC(8): G01N23/04
Inventor 须颖董友
Owner 天津三英精密仪器股份有限公司
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