Multichannel power controller

Abstract

Disclosed is a multichannel power controller which makes it possible to reduce the power capacity of power source equipment to the required minimum. The power controller (3) presets the rated power value of the load for each of a plurality of channels (ch1 to ch5), and presets the total-power upper limit value constituting the upper limit value of the sum of the output power of all of the channels at each unit time (minimum time for turning the output ON or OFF). Then, at each unit time, the power controller calculates the target output value of each channel and, after completion of integration processing of all of the channels, performs the following processing in sequence starting from the channel having the largest integration value. [Processing] If the integration value does not exceed a threshold value, the output of the channel in question is turned OFF during the unit time. If the integration value exceeds the threshold value and if a value, which is obtained by adding the rated power aggregate value of a rated power aggregator that aggregates the rated power values of the load of the channels the output of which has been turned ON and the rated power value of the load of these channels, is equal to or below the total-power upper limit value, processing is performed for adding the rated power values of these channels to the rated power aggregator, processing is performed for turning these channels ON for output during the unit time, and processing is performed for subtracting 1% or 100% from the target output value integrator of these channels. If the integration value exceeds the threshold value and the value obtained by adding the rated power aggregate value and the rated power values of these channels is equal to or greater than the total-power upper limit value, the output of the channels in question is turned OFF during the unit time.

Description

Technical field [0001] The present invention relates to, for example, a multi-channel power controller that controls the supply of AC power to a heater for heating in temperature control of a semiconductor manufacturing device or an injection molding machine, and controls the supply of AC power to loads other than the heater. Background technique [0002] The output of the regulator is used as the input, the input value is used as the target output value, and the voltage, current, or power value proportional to the target output value is used to supply AC power to the load (hereinafter referred to as "output") power The regulator has a phase control method (refer to Figure 15 (A)) and control the output on or off to control the ratio of the "on time" to the "on time + off time" (hereinafter referred to as "load ratio") and Proportional method of target output value (refer to Figure 15 (A) and (b)) (For these control methods, refer to Patent Document 1 or 2, for example). [0003] ...

AI Technical Summary

Problems solved by technology

However, the power required for stable control is less than 50% in most cases, and as a result, the power supply equipment becomes redundant power supply equipment in many cases.

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