Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology

A fringe projection and technical measurement technology, applied in the field of measurement, can solve the problem that the optical microscope can only obtain the two-dimensional information of the measured object, etc., and achieve the effect of high utilization value, high precision and low price

Inactive Publication Date: 2012-11-07
NANJING UNIV OF SCI & TECH
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Problems solved by technology

[0005] The purpose of the present invention is to provide a measurement system and method for measuring the surface height of tiny objects based on digital fringe projection technology, which solves the technical problem that traditional optical microscopes can only obtain two-dimensional information o

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  • Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology
  • Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology
  • Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology

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Embodiment Construction

[0019] combine figure 2 , the present invention is based on digital fringe projection technology to measure the measurement system of the surface height of tiny objects, comprising a working platform 1, a TV microscope lens 3, a lens group 4 and a micro projector 5, and the TV microscope lens 3 is vertically placed downwards on the working platform 1, The lens of the micro-projector 5 can be placed on the same plane at an angle of 10°-30° downwards with the television microscope lens 3, and the lens group 4 is placed in front of the lens of the micro-projector 5 to focus the micro-projector 5 to project The sinusoidal fringe image of , the object 2 to be measured is placed on the working platform 1 . The order of the lenses of the lens group 4 from top to bottom is a biconvex lens with a focal length of 50.8mm, a biconvex lens with a focal length of 100mm, a doublet lens with a focal length of 75mm, a polarizer, and a focal length Be the biconvex lens of 100mm, take the lens...

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Abstract

The invention discloses a measurement system and a measurement method for measuring the height of the surface of a micro object on the basis of a digital fringe projection technology. The measurement method comprises the following steps of: firstly, constructing a three-dimensional measurement system, wherein the three-dimensional measurement system comprises a working platform, a television microscope lens, a lens assembly and a mini projector, the television microscope lens is vertical to the working platform to be placed downward; a lens of the mini projector is downward and is placed on the same plane with the television microscope lens, the lens assembly is arranged in front of the lens of the mini projector and is used for focusing a sine fringe image projected by the mini projector and the object to be measured is placed on the working platform; and carrying out calibration on the three-dimensional measurement system to obtain a final phase of the surface of the object to be measured so as to obtain the height of the surface of the object to be measured. According to the invention, the height condition of the surface of the object to be measured is accurately obtained; the measurement system and the measurement method have high utilizing value and high accuracy, is convenient to measure and install and has low cost; and a measurement result is specifically shown in Figure 3 and Figure 4.

Description

technical field [0001] The invention belongs to the field of measurement technology, in particular to a measurement system and method for measuring the surface height of tiny objects based on digital fringe projection technology. Background technique [0002] In the field of industrial inspection and industrial design, microscopes are widely used by people. With traditional optical microscopes, we can only obtain two-dimensional information of the measured object. However, in some specific occasions, when quantitative analysis is required, if there is only two-dimensional information, it is obviously not enough to meet the needs. For example, real-time detection of electronic components and surface condition detection of grinding wheels. It is for these reasons that the quantitative detection of the three-dimensional shape of tiny objects is becoming more and more important. [0003] In recent years, many 3D measurement technologies have emerged continuously. Three-dimen...

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Application Information

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IPC IPC(8): G01B11/02
Inventor 陈钱冯世杰顾国华左超钱惟贤隋修宝何伟基任建乐李如斌申国辰封芳潇雨
Owner NANJING UNIV OF SCI & TECH
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