Measurement system and method for measuring height of surface of micro object on basis of digital fringe projection technology

Abstract

The invention discloses a measurement system and a measurement method for measuring the height of the surface of a micro object on the basis of a digital fringe projection technology. The measurement method comprises the following steps of: firstly, constructing a three-dimensional measurement system, wherein the three-dimensional measurement system comprises a working platform, a television microscope lens, a lens assembly and a mini projector, the television microscope lens is vertical to the working platform to be placed downward; a lens of the mini projector is downward and is placed on the same plane with the television microscope lens, the lens assembly is arranged in front of the lens of the mini projector and is used for focusing a sine fringe image projected by the mini projector and the object to be measured is placed on the working platform; and carrying out calibration on the three-dimensional measurement system to obtain a final phase of the surface of the object to be measured so as to obtain the height of the surface of the object to be measured. According to the invention, the height condition of the surface of the object to be measured is accurately obtained; the measurement system and the measurement method have high utilizing value and high accuracy, is convenient to measure and install and has low cost; and a measurement result is specifically shown in Figure 3 and Figure 4.

Description

technical field [0001] The invention belongs to the field of measurement technology, in particular to a measurement system and method for measuring the surface height of tiny objects based on digital fringe projection technology. Background technique [0002] In the field of industrial inspection and industrial design, microscopes are widely used by people. With traditional optical microscopes, we can only obtain two-dimensional information of the measured object. However, in some specific occasions, when quantitative analysis is required, if there is only two-dimensional information, it is obviously not enough to meet the needs. For example, real-time detection of electronic components and surface condition detection of grinding wheels. It is for these reasons that the quantitative detection of the three-dimensional shape of tiny objects is becoming more and more important. [0003] In recent years, many 3D measurement technologies have emerged continuously. Three-dimen...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a measurement system and method for measuring the surface height of tiny objects based on digital fringe projection technology, which solves the technical problem that traditional optical microscopes can only obtain two-dimensional information of the measured object, and aims at measuring the surface height of tiny objects. Objects, using a TV microscope and a micro-projector to form a three-dimensional measurement system, accurately obtain the height of the surface of the object to be measured, and the cost is low and the structure is simple

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